本研究旨在開發一閉迴路短行程微/奈米定位系統，系統主要元件包含以有限元素分析設計之具位移放大機構之微/奈米定位平台、壓電致動器、光纖干涉儀量測系統、PC等，系統以LabView程式語言撰寫程式作定位系統之整合控制。
本研究自行設計一利用槓桿原理之位移放大機構，並藉由商用ANSYS分析軟體進行設計上的應力及位移分析，利用最佳化功能快速分析出在材料的彈性範圍內，機構各部位最佳的尺寸值，並檢視是否有達到所設計的目標。
本研究之設計目標在於，利用行程只有15 μm之壓電致動器，推動一行程須達50 μm之短行程精密定位平台，並利用各項測試定義出微定位平台的性能，且與分析做比較。此定位平台經測試後，定位系統具有10 nm之步階定位能力，斜坡追蹤速度為5 nm/s，三軸之旋轉角最大為2.46〞，最大位移量為45 μm。
此整合系統之特點在於結構簡單、成本低廉、硬體需求不高。並藉由光纖干涉儀量測系統作位置回授之閉迴路控制系統，能在時間內達到高精度控制的功能，對發展自主性之完整奈米定位系統建立關鍵研發基礎。

The objective of this research is to develop a PC-based closed loop short travel micro-nano-positioning system. The developed system mainly consists of a piezoelectric actuator, a displacement enlarged mechanism, a micro-nano-positioning stage analyzed by the finite element method software - ANSYS, an optical fiber interferometer system, and a PC. A set of software programmed with the LabView programming language was developed to conduct the PID control of the positioning system.
The designed micro-nano-positioning stage was constrained by four sets of double compound leaf springs cut by wire electrical discharge machining. The geometric dimensions of the leaf springs were determined by executing the optimization function using the ANSYS software, so that the induced maximum stress during deflection was in elastic range.
The maximum travel of the developed micro-nano-positioning stage was about 45 μm through the displacement enlarged mechanism driven by the piezoelectric actuator with a maximum travel of 15 μm. Based on the test results, the positioning capability of 10 nm under the slope tracing speed of 5 nm/s of the developed positioning system was possible. The maximum yaw error of the micro-nano-positioning stage was about 2.46 arc-seconds.

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