本研究旨在開發一閉迴路X、Y軸短行程微/奈米定位系統，系統主要元件包含以有限元素分析設計具位移放大機構之微/奈米定位平台、壓電致動器、光纖干涉儀量測系統、PC等，系統以LabView程式語言撰寫程式介面作定位控制系統之整合。
本研究以串聯式機構為設計，利用槓桿原理之位移放大機構，以ANSYS有限元素分析軟體進行設計上的靜態及動態分析，並完成局部尺寸最佳化的設計。
依據本研究之實驗結果，所研製之雙軸短行程精密定位平台其X軸之位移可達40 μm，Y軸之位移可達55 μm。此定位平台經測試後，定位系統具有10 nm之步階定位能力，在以PC based下所建立的閉迴路PID控制系統，追蹤誤差大約可控制在10 nm，X軸最大行程之Yaw error為6.94〞，Y軸最大行程之Yaw error為0.55〞。
此整合系統之特點在於結構與控制邏輯簡單，並藉由光纖干涉儀量測系統作位置回授之閉迴路控制系統，能在短時間內達到高精度控制的功能，對發展自主性之完整奈米定位系統建立關鍵研發基礎。

The objective of this research is to develop a PC-based closed loop short travel X-Y axes micro-/nano-positioning system. The developed system mainly consists of two piezoelectric actuators, two displacement enlarged mechanisms, a micro-/nano-positioning stage analyzed by the FEM software - ANSYS, two optical fiber interferometer systems, and a PC. A set of software written with the LabView programming language was developed to construct the PID closed-loop control of the positioning system.
The structure of the positioning stage has been designed as a nested serial type. A lever for displacement magnification mechanism has been used to enlarge the travel of each PZT actuator. The movement of the designed micro-/nano-positioning stage body was constrained by four sets of flexible double compound leaf springs cut by wire electrical discharge machining. The geometric dimensions of the leaf springs have been determined by executing the optimization function using the ANSYS software on static and dynamic analysis.
Based on the test results, the designed stage was capable of positioning within the range of 40 μm and 55 μm along X- and Y-axes, respectively. The positioning capability was about 10 nm under the slope tracing speed of 100 nm/s. The error of the circular test controlled by the PC-based PID controller was about 10 nm. The maximum yaw error of the stage moving along x-direction was about 6.94 arc-seconds, whereas that of the stage moving along y-direction was about 0.55 arc-seconds.

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