研究生: |
鄭仕傑 Shih-chieh Cheng |
---|---|
論文名稱: |
感應熔煉爐生長多晶矽之模擬分析 Simulation and Analysis of an RF Induction Heating Furnace for Polycrystalline Silicon Growth |
指導教授: |
連國龍
Kuo-Lung Lian |
口試委員: |
吳瑞南
Ruay-Nan Wu 王星豪 Shing-Hoa Wang |
學位類別: |
碩士 Master |
系所名稱: |
電資學院 - 電機工程系 Department of Electrical Engineering |
論文出版年: | 2012 |
畢業學年度: | 100 |
語文別: | 中文 |
論文頁數: | 106 |
中文關鍵詞: | 多晶矽 、模擬分析 |
外文關鍵詞: | polycrystalline, simulation analysis |
相關次數: | 點閱:304 下載:5 |
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真空感應熔煉與控制凝固在生產多晶矽是新發展的製程方式,比起傳統的電阻加熱法,其主要優勢在於加熱速度快。而太陽能電池可分為以下三種類型-單晶矽、多晶矽與非晶矽。其中,多晶矽佔了太陽能市場的50%,原因在於其成本低於單晶矽且效率高於非晶矽。
在太陽能電池中的多晶矽,如何控制此矽晶熔體溫度的關鍵在於感應爐中的參數,而要探討每個參數對矽晶熔體溫度的影響是一件昂貴且費時的事情。因此,在經濟的考量上,以數值模擬設計一個感應熔煉爐是可行的。本論文探討了數個感應熔煉爐的參數,其中包括:石墨的塗層、石墨的幾何形狀以及水冷板的材質。
本研究結果顯示:
1. 以不鏽鋼(Steel 304)材質製成的水冷板加熱效果最好
2. 石墨坩鍋的厚度越大,加熱效果越好
3. 石墨分段的段數越多,溫度越低
4. 石墨分段距離越大,溫度越低
5. 石墨外層表面塗上導熱系數低之材料,可防止熱消散,內層表面塗上導熱系數高之材料,可易於熱量傳導至矽。
The vacuum induction melting and control solidification is a new developed process for the manufacture of polycrystalline silicon with the advantage of quick heating rate compared to the traditional resistance heating method.
The parameters of the induction furnace play a key role in controlling the temperature of the melt of polycrystal silicon for solar cells. It is expensive and time-consuming to investigate experimentally how each parameter affects the silicon melt temperature. Therefore, numerical simulation is an economically feasible means to design an induction melting furnace. This thesis investigates several parameters of an induction furnace. These parameters include coatings on the graphite susceptor, geometries of the graphite suceptor, and the material of the cooling base plate.
Numerical simulations show that:
1. Cooling base plate made of steel 304 yields the best heating efficiency;
2. The thicker the graphite susceptor, the higher the temperature is raised;
3. The more section the graphite susceptor divided, the lower the temperature of the susceptor is raised;
4. The bigger distance between two sections, the lower the temperature of the susceptor is raised;
5. The coating material at the outer surface of the susceptor should be the one with low thermal conductivity to prevent heat losses. On the other hand, the coating on the inner surface should be one with high thermal conductivity to allow easy heat transfer.
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