本研究目的為使用低成本之組件搭配以超音波馬達為致動器，開發具有精密定位功能之微奈米定位平台，降低因組合長短行程平台所帶來的複雜性及誤差。
本研究為延續台大實驗室所開發之共平面平台作為整個系統的基礎，搭配高精度雷射繞射式光學尺(LDGI)進行位移迴授控制，目前已完成雙軸閉迴路精密定位平台，並可進行循圓測試，半徑100 μm，其真圓度誤差為4.01 μm。Z軸部分本研究亦探討微工具機之振動誤差，並擬定以雙超音波馬達推動加工主軸，藉此互相抵消平台的側向力以及增加主軸的推力，確保加工時的穩定性。本研究亦進行新型控制器(ELC 2200)之開迴路定位誤差測試，以每步距0.1 μm驅動，誤差值均小於0.068 μm。未來將利用精密定位平台及Z軸架構，搭配CNC控制器開發新的系統，完成一具有高精度之微型工具機。

The objective of this research is to develop an X-Y positioning stage with nanometer resolution using the low-cost components and ultrasonic motors, and to reduce the complexity and error resulted from the combination of a long-stroke stage and short-travel stage.
The co-planar stage developed by National Taiwan University was integrated with two Laser Diffraction Grating Interferometer systems (LDGI) as displacement feedback sensors, so that a two-axis closed-loop control was possible. A circular positioning test with the radius of 100 um using the developed stage was tested, and the overall roundness error was about 4.01 um based on the test results. The vibration amplitude tests of the Z-axis of a micro-milling machine driven by either an ultrasonic motor or two ultrasonic motors has also been investigated, to provide a better design information of the Z-axis.
The open-looped positioning error test of the stage, driven by a new controller (ELC 2200), has also been tested. For a positioning of 1 um, the deviations were smaller than 0.068 um using the step positioning of 0.1 um. The test results, regarding the X-Y positioning stage and the vibration amplitude tests of the Z-axis, will be applied to the design of a micro-milling machine in the future.

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