以不鏽鋼(SS)作為基板的可撓式銅銦鎵硒(CIGS)太陽能電池由於其有前景的應用潛力，已引起相當大的關注。但其有害的基板成分在高溫製程中會擴散進入CIGS吸收層，限制了它的性能。薄膜金屬玻璃(TFMGs)沒有晶界，是理想的擴散阻障層材料。因此在實驗中嘗試將薄膜金屬玻璃作為擴散阻障層應用于以SS作為基板的CIGS太陽能電池中。
本研究以射頻脈衝磁控濺鍍法鍍制鋯基(Zr53.5Cu29.1Al6.5Ni10.9, Z-TFMG)及鎢基(W94Ni0.6B5.4, W-TFMG)金屬玻璃薄膜作為擴散阻障層,并製備了Mo/SS與 Mo/Z-TFMG/SS層狀結構進行前期研究，其中Z-TFMG厚度為100 nm。同時也製造了以SS為基板的CIGS太陽能電池，其中W-TFMG 與Z-TFMG厚度皆為 70 nm。利用X射線繞射法(XRD)，穿透式電子顯微分析法(TEM),能量色散光譜法(EDS)以及電流-電壓(I/V)特性分析，樣品中的擴散行為及CIGS太陽能電池的性能得到了量測及評估。
在Mo/SS樣品的Mo層中，結晶形態以及元素成分在退火后發生了變化，表明SS的成分擴散進入Mo層中。同樣的變化並未在Mo/Z-TFMG/SS中觀測到。對於以SS為基板的CIGS太陽能電池來說，在未鍍擴散阻障層的太陽能電池中發生了最嚴重的擴散，其性能也最差；在鍍有W-TFMG的太陽能電池中有微量的擴散發生，其性能也有提高；在鍍有Z-TFMG的太陽能電池中未探測到擴散，其性能也是最好的。
基於以上結果，W-與Z-TFMG在以SS為基板的CIGS太陽能電池中作為擴散阻障層的可行性得到了證實。未來計劃進一步優化TFMG擴散阻障層的厚度以及使以SS為基板的CIGS太陽能電池擁有可比於以鈉鈣玻璃作為基板的CIGS太陽能電池的效率。

Flexible CIGS solar cells on stainless steel (SS) substrates have attracted considerable interests for their promising potentials, yet the detrimental diffusion of various SS constituents into CIGS absorber under high processing temperature limits the performance of these cells. Thin film metallic glasses (TFMGs), free from grain boundaries and thus lacks fast diffusion paths, are ideal materials for diffusion barrier. Therefore, to employ TFMG diffusion barriers for SS-based CIGS solar cells is probably worth trying.
In this study, TFMGs of Zr53.5Cu29.1Al6.5Ni10.9 (Z-TFMG) and W94Ni0.6B5.4 (W-TFMG) were deposited as diffusion barriers by RF magnetron sputtering. Layered structures of Mo/SS and Mo/Z-TFMG/SS with Z-TFMG thickness of 100 nm were processed and annealed for preliminary investigation. In addition, SS-based CIGS solar cell devices with and without 70-nm-thick Z- or W-TFMG barriers were also fabricated. By using X-ray diffraction (XRD), transmission electron microscopy (TEM), energy dispersive spectroscopy (EDS) and current-voltage (I/V) characterization, the diffusion behaviors in the samples and the performance of the cells were measured and evaluated.
In Mo/SS, crystallographic and compositional changes within the Mo layer are found after annealing, which could be attributed to diffusion of substrate constituents. On the other hand, such changes are absent in the Mo/Z-TFMG/SS. For the CIGS solar cells on SS, the barrierless one suffering the most extensive diffusion has the worst performance, followed by the minor one in W-TFMG cell with improved efficiency. No detectable diffusion is observed in the Z-TFMG cell correlating to its best performance among these cells.
Based on the results, the feasibility to use Z- and W-TFMG as diffusion barriers for SS-based CIGS solar cells is demonstrated. Further work needs to be done to optimize the thickness of the TFMGs as well as to fabricate CIGS cells on SS with comparable efficiency to those based on glass substrates.

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