在精密加工與製造工業上，外界振動干擾對產品的精度有很大的影響，常見的隔振系統均屬於被動式架構，例如氣壓隔振桌，對動態變化大的外界振動干擾，被動式隔振架構的隔振效果有其限制，本研究利用壓電致動器響應快、出力大的優點，設計出主動式隔振平台，並且以氣壓平台模擬外界振動干擾，利用主動式隔振平台來消除氣壓平台所產生的外界干擾量以達到主動式隔振的效果。
本研究採用函數近似適應性控制器作主動式隔振控制，利用線上參數估測系統以架構適應性控制器，外界干擾與隔振系統之不確定性則利用函數近似法來近似之，隔振系統閉迴路的穩定性以Lyapunov 穩定準則加以驗證，並將隔振平台加入灰色預測器以達成預先補償控制之架構，另一方面本研究以減少函數近似之正交基底函數數目為目標，加入閉迴路滑動模糊控制器來消除因為減少正交基底函數數目所造成的近似誤差。
本研究所提出不同的控制架構，實際應用於主動式隔振平台之振動抑制，以驗證壓電平台受到氣壓平台所產生之單頻外界振動干擾與複頻外界振動干擾影響的控制性能以及壓電平台之隔振效果，經過實驗証明本研究所提出之控制器針對不同外界振動干擾下可達良好的主動隔振性能。

It is well known that the external vibration disturbance will influence the precise machining and manufacturing accuracy. Usually, pneumatic isolation table is used as the passive oscillation suspension. However, passive pneumatic system has low frequency isolation limitation. In this study, a piezoelectric actuating table is designed for the active vibration isolation purpose by using the large payload capacity and quick response advantage of piezo actuator.
Here, adaptive control structure is constructed based on on-line parameters estimation scheme and Fourier series based function approximation scheme for active vibration control. The function approximation is used to estimate system disturbance and uncertainty. The Lyapunov criterion is used to prove the control system stability. The grey predictor is introduced to improve the control performance of the isolation system by adopting its pre-compensation behavior. Finally, a combination of fuzzy sliding-mode with function approximation based adaptive control is proposed to control this active piezoelectric isolation system by using finite terms of orthogonal function.
The proposed controllers are employed to control an active vibration isolation table. A four legs pneumatic table is used to generate the system external disturbance. The experimental results show that the proposed controllers can achieve good vibration performance under different external disturbance. The additional fuzzy sliding-mode control loop for reducing the number of approximation functions and improving the control performance are investigated, too.

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