室內密閉空間因空氣不流通造成氧氣含量不足常導致注意力下降、缺氧不適或導致生病，為解決這項問題，本研究研製出一導氧元件(Oxygen Activator Unit, OAU)，其功能是將密閉空間外之氧氣導入室內，使室內空間持續保持人體最舒適的環境下。導氧元件的製作應用了多孔質陽極氧化鋁製程(Porous Anodic Alumina, PAA)製作出多孔質透氣基板(porous air permeable substrate, PAPS)增加三相反應面積(Tree-Phase-Boundary, TPB)，並於製程中成功製作出PAA厚度106µm、平均孔徑122.9nm 和平均間距168.8nm之孔質透氣基板，導氧功能性薄膜材料白金(Platinum, Pt)及釔安定氧化鋯(Yttria Stabilization Zirconia, YSZ)的部分使用RF磁控濺鍍機將沉積於多孔質基板透氣基板上，製作出導氧元件，在自行設計之導氧功能測試平台測試導氧功能後確定元件可確實做動，且具有外界含氧量越高,導氧功能越強之趨勢，並在測試氧氣以200sccm(Standard Cubic Centimeter per Minute, SCCM)輸送時有最高的導氧量，其結果為密閉腔體內之氧氣由20.7%上升至25.9%，上升幅度為5.2 %，同時在通氧150 sccm持續10分鐘之穩定性測試中，所量測的數值皆相當穩定，相差小於1%，由此證明了本研究所製作之導氧元件具有穩定之導氧功能。

Clean air with enough oxygen is critical to human environment. This study is to develop an oxygen activator unit (OAU) to conduct oxygen into non-circulation room. The porous anodic alumina (PAA) process is used to make the porous air permeable substrate(PAPS). These porosity can increase the area of three-phase boundary(TPB) and then Platinum (Pt) and the Yttria stabilization Zirconia (YSZ) have been deposited on the porous air permeable substrate as an functional oxygen activated thin film(OATF). Another assembly is an oxygen activator unit fabricated successfully. The oxygen activator unit has been integrated in a test platform to measure the oxygen in the case of 50 sccm to 200 sccm. Experimental results show that the oxygen activator unit increases the oxygen contents as the supply of oxygen increases. The maximum efficiency occurs in oxygen supply as 200 sccm, the oxygen content of the test chamber measured by multi-gas monitor increasing from 20.7% to 25.9%, or by increasing 5.2%. In order to verify the stability of the oxygen activator unit, the oxygen supply rate maintains as 150 sccm for 10 minutes. After measuring 10 runs, the oxygen content of the test chamber changes less than 1%, thus the stability of oxygen activator unit has been verified. This oxygen activator unit can be applied on airplane, vehicle or cabinet of boat that needs higher oxygen for comfortable environment of driver and passenger. Future study can focus on improving the efficiency of the oxygen activator unit.

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