研究生: |
吳佳盈 Chia-Yin Wu |
---|---|
論文名稱: |
以射頻電漿輔助化學氣相沉積法製備高效率矽晶異質接合太陽能電池之研究 Progress in high efficiency crystalline silicon heterojunction solar cells prepared by PECVD |
指導教授: |
洪儒生
Lu-sheng Hong |
口試委員: |
周賢鎧
Shyan-kay Jou 陳良益 Liang-yih Chen |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 化學工程系 Department of Chemical Engineering |
論文出版年: | 2011 |
畢業學年度: | 99 |
語文別: | 中文 |
論文頁數: | 57 |
中文關鍵詞: | 鈍化、表面復合速率 、異質接合 、表面織構 、開路電壓 、太陽能 |
外文關鍵詞: | passivation, surface recombination velocity, heterojunction, surface textured, open circuit voltage, solar cell |
相關次數: | 點閱:397 下載:0 |
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本論文的主題為以射頻電漿輔助化學氣相沉積法製作非晶矽薄膜應用於異質接合太陽能電池之研究,第一部分的實驗中,我們先建立出優良的矽晶片清洗程序,接著再於清洗後的矽晶片雙面沉積本質層非晶矽薄膜,以評估此薄膜的表面鈍化效果。之後,我們製作出導電性佳的 p 層、n 層以及 ITO 薄膜,並應用於矽晶異質接合結構的電池製作上。
Crystalline silicon heterojunction (SHJ) solar cells were prepared through
the growth of hydrogenated amorphous silicon (a-Si:H) thin layers by plasma-enhanced chemical vapor deposition (PECVD). A cleaning procedure for Si wafers suitable for SHJ were developed. A very low surface recombination velocity for the double-sided intrinsic a-Si:H coating on an n-type c-Si wafer was achieved. Also, an optimization of the fabrication process for the SHJ was discussed.
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