本論文以潔淨室中微環境為主要研究方向，深入探討其中之高潔淨區域－面板儲存區(0.1μm微粒子)，著重於內部流場與污染粒子分佈的探討，期望能在設計潔淨室時，藉助電腦的運算能力來節省所需耗費的財力、物力及人力等各項有效資源。研究內容包含：內部流場分析、開孔率配置以及塵埃粒子的沉積改善。利用有限體積法的軟體FLUENT來分析計算其結果，並採用暫態之動態網格(Moving Mesh)的方式，分析真實物體運動狀態之流場分佈，以模擬現實狀況中，移動物體對內部氣流所造成之重大影響。首先利用初步設計分析出內部流場之均勻度與粒子沉積情形；再者以調整入風口面積做為改善，並與初步模擬相比較兩者間之差異性及改善後所得之分析結果；最後以節省總供應流量為訴求，調整入風口面積與初始速度間的配置，並維持所需之流場分佈與粒子排除狀況，以達到節省經濟成本的主要目的。由模擬的結果可得知，為了使潔淨度提高及污染微粒排除迅速，潔淨室內部氣流分佈必須相當均勻，且避免迴流的發生，才得以達到最佳效能，而所得之結論亦可提供關於潔淨室之微環境的建造及改良作為參考並評估善後之成效。

The target of this study is the microenvironment, a high clean region – LCD Stocker (0.1 mote), within a clean-room. The major emphases are focused on the discussions of the inside flow field and the distribution of polluted particles. By taking advantage of the CFD calculations to visualize the flow patters inside this microenvironment, the period of designing clean-room can be reduced in a rigorous and systematic manner under the limited capital, material, and human resources. The subjects include the flow field analysis, the porosity ratio, and the improvement for the situation of the accumulated mote. With the aids of CFD code FLUENT, the flowfield simulations for a moving stocker inside this high clear region are accomplished by applying the method – moving mesh of unsteady state under various operating conditions. First, the uniform ratio and the deposited mote of the flow field for the initial design are carefully examined based on the CFD results. Afterwards, a new design with an adjusted inlet air velocity is proposed to fix the circulation patterns observed in the initial design. At last, the inlet area and inlet airflow distribution are rearranged to decrease the total flowrate needed, which represents a cost reduction on operation, while the required flowfield distribution and elimination rate of the particles are still maintained. In conclusion, the air’s clean ratio can be improved and the polluted motes will be excluded quickly when the air’s distribution in the clean room is equally uniform to avoid the eddy. In the meantime, this conclusion also serves as a good reference for the construction or the improvement of the clean room’s microenvironment.

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