研究生: |
馬佳誠 Jia-cheng Ma |
---|---|
論文名稱: |
以多步陽極氧化法製作漸進式二氧化鈦奈米管及其氣體感測應用研究 The gas sensing application of graded TiO2 nanotubes by multi-step anodization |
指導教授: |
黃柏仁
Bohr-Ran Huang |
口試委員: |
林啟瑞
none 周賢鎧 none 郭鴻飛 none |
學位類別: |
碩士 Master |
系所名稱: |
電資學院 - 光電工程研究所 Graduate Institute of Electro-Optical Engineering |
論文出版年: | 2014 |
畢業學年度: | 102 |
語文別: | 中文 |
論文頁數: | 132 |
中文關鍵詞: | 二氧化鈦奈米管 、漸進式 、陽極氧化 、氫氣感測 |
外文關鍵詞: | TiO2 nanotubes, graded, anodization, hydrogen sensor |
相關次數: | 點閱:317 下載:3 |
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利用多步驟陽極氧化法,在室溫下以含氟的EG/H2O電解液中,將鈦片製備成漸進式平坦型二氧化鈦奈米管(Graded-P-TNT),經過一小時的280°C退火,再以過氧化氫對其表面進行一個半小時的化學處理後,即由漸進式平坦型二氧化鈦奈米管(Graded-P-TNT)變成漸進式聚集型二氧化鈦奈米管(Graded-A-TNT),並用FESEM、XRD及PL分析其表面形貌、結晶相、鍵結強度與材料品質,且應用於氫氣感測器。
本實驗結果發現,在30V~50V的漸進式平坦型二氧化鈦奈米管結構(Graded-P-TNT(30V~50V))有較大接觸面積及較好的結晶相與材料品質,使其對氫氣有最高的靈敏度546%,並以過氧化氫對其表面進行化學處理後,變成漸進式聚集型二氧化鈦奈米管(Graded-A-TNT(30V~50V)),且因為表面呈現聚集狀,增加了表面的接觸面積,讓其對氫氣有更高的靈敏度575%。
The graded planar TiO2 nanotubes (Graded-P-TNT) were synthesized in NH4F/ethylene glycol (EG) electrolyte by using multi-step anodization method with operating step voltages at room temperature, and then were annealled by thermal oxidation at 280°C for 1 hour under atmosphere ambient. Graded-P-TNT can be transformed into graded aggregated TiO2 nanotubes (Graded-A-TNT) after H2O2 post-treatment for 1.5 hour at room temperature. FESEM, XRD, Raman spectroscopy, and PL were used to analyze the surface morphology, crystallinity, chemical binding, and film quality, respectively, and apply for hydrogen sensing.
In this work, it was found that Graded-P-TNT (30V~50V) hydrogen sensing property with the high response of 546% since the larger area of contact and better film quality. Graded-A-TNT (30V~50V) hydrogen sensing property with the better response of 575% might be due to the increasing area of contact after the H2O2 post-treatment.
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