研究生: |
許馨予 Hsin-Yu Hsu |
---|---|
論文名稱: |
紫外光臭氧處理和ITO奈米顆粒改質石墨烯 應用於光及氨氣感測器 Graphene Modified by UV/ozone Treatment and ITO Nanoparticles as Photodetector and Ammonia Sensor |
指導教授: |
周賢鎧
Shyan-Kay Jou |
口試委員: |
黃柏仁
Bohr-Ran Huang 胡毅 Hu Yi |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 材料科學與工程系 Department of Materials Science and Engineering |
論文出版年: | 2021 |
畢業學年度: | 109 |
語文別: | 中文 |
論文頁數: | 202 |
中文關鍵詞: | 石墨烯 、紫外光臭氧處理 、氧化銦錫 、蕭特基元件 、氨氣感測器 、光感測器 |
外文關鍵詞: | UV/ozone Treatment, ITO, Ammonia Sensor, Photodetector |
相關次數: | 點閱:666 下載:0 |
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本研究透過化學氣相沉積法生成雙層石墨烯,並利用兩種改質方式修飾石墨烯,一種為紫外光臭氧處理,可以提高石墨烯表面含氧官能基,增加氨氣吸附能力及光電子轉移效果,另一種為濺鍍ITO奈米顆粒於表面,適當分布的奈米顆粒不只可以提高氣體分子吸附,由顆粒表面解吸的氧離子,亦可增加光照時的光電流。兩種改質方法以拉曼進行分析,可以發現ID/IG會變大,而I2D/IG變小,皆會對石墨烯造成缺陷。除此之外,會透過UV-visible、AFM、XPS進行改質石墨烯之分析,了解改質方法對石墨烯產生之其他影響。
本實驗的氨氣感測結果,在UVO處理改質方面,經過15分鐘處理時間之元件於50 ppm的氨氣濃度下有14.8 %的響應度,高於原石墨烯的2.6 %,而響應時間為58.3 s,回復時間為106.2 s,皆快於原石墨烯所花費的時間,因為增加的含氧基團數量能夠有效吸附氨氣氣體分子,提高其響應度。在ITO顆粒沉積方面,以30 W濺鍍30 s的樣品,於50 ppm的氨氣濃度下有8 %的響應度,高於原石墨烯,其響應時間為40.0 s,回復時間為124.7 s,亦較原石墨烯所花費的時間短,這是因為ITO奈米顆粒存在,不只可以提高氨氣吸附能力,P-type的ITO與N-type石墨烯接觸,可以產生p-n界面,加快電子傳輸效果。
實驗進一步量測光感測性能,發現元件具有 self power 特性,且開關比在UVO處理之元件可以高達106,濺鍍ITO的元件可以達到105。另外,比較其響應度及外部量子效應得知,改質之石墨烯皆有較大的數值。UVO處理後更為寬廣的能隙,可以增加吸收光子的能力;在光照射下ITO顆粒內電子會被激發而躍遷,產生自由電子生成強電流,增加石墨烯對光的響應。基於上述結果,UVO處理及濺鍍ITO 奈米顆粒皆可有效提升石墨烯作為光與氨氣感測器之響應。
In this study, bi-layer graphene was grown by chemical vapor deposition, and two modification methods were used to modify graphene. One is UV/ozone treatment. This way can increase the active oxygen functional groups on the graphene surface, which can efficiently act as adsorption sites for detected gas molecules. The other one is depositing ITO nanoparticles on the surface. It can not only increase the adsorption of gas molecules, but the oxygen ions desorbed from the surface of the particles can also increase the current during light exposure. We can find that ID/IG become larger and I2D/IG become smaller from Raman spectroscopy by modifying. As to show that more defects have been created in graphene. In addition, UV-visible, AFM, and XPS were conducted to understand other effects of modification methods on graphene.
The result of ammonia gas sensing in this experiment, the response is about 14.8 % for UVO treated 15 min Schottky device, It is higher than PG of about 2.6 % to 50 ppm NH3. UVO 15’s response time is 58.3 s and the recovery time is 106.2s, which is faster than the pure graphene one. In terms of ITO nanoparticles deposition, the 30W-30s-ITO based ammonia sensor at 50 ppm exhibit response of 8%. The response time is 40.0 s and the recovery time is 124.7 s, which are also better one. Because the p-n interface between the n-type ITO and the p-type graphene produces a stepwise energy barrier, electrons can pass through the stepped energy barrier more quickly.
For the photodetector, the device show the self-powered characteristic. The ON/OFF ratio of UVO-treated’s responsivity can achieve up to 106. The ON/OFF ratio of ITO deposition’s responsivity can achieve up to 105. In addition, graphene modified by UV/Ozone treatment and ITO nanoparticles have a larger value on responsivity and external quantum efficiency. The wider energy gap after UVO treatment can increase the ability to absorb photons. The ITO particles’s electrons become excited state under the light. It generates strong current and increas the response of graphene. Based on the above results, we know that both UVO treatment and ITO nanopartical can effectively improve the response of graphene as a photodetector and ammonia sensor.
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