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| 研究生： |
黃雅琪 Ya-Chi Huang |
|---|---|
| 論文名稱： |
具有超晶格鰭片絕緣核心之奈米級鰭式場效電晶體 Nano-scale FINFET with superlattice fin core insulator |
| 指導教授： |
莊敏宏
Miin-Horng Juang |
| 口試委員: |
張勝良
Sheng-Lyang Jang 徐世祥 Shih-Hsiang Hsu |
| 學位類別： |
碩士 Master |
| 系所名稱： |
電資學院 - 電子工程系 Department of Electronic and Computer Engineering |
| 論文出版年： | 2023 |
| 畢業學年度： | 111 |
| 語文別： | 英文 |
| 論文頁數： | 50 |
| 中文關鍵詞： | 鰭式場效電晶體 、超晶格核心 |
| 外文關鍵詞： | FinFET, Superlattice fin core insulator |
| 相關次數： | 點閱：163 下載：1 |
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鰭式場效電晶體在目前半導體產業有非常重要的地位，其比傳統平面式金氧半場效電晶體更有可以縮小 的 特性，除了使佈局的面積縮小以外，其電特性也比傳統平面式金氧半場效電晶體更優秀，提供更好的閘極控制 能力。然而，在元件微縮過程中，發現更窄的鰭片在實際製程中會容易斷裂，所以本論文提出加入超晶格鰭片核心絕緣體去改善這項問題。此外模擬了元件微縮的過程去評估元件的結構參數如何影響元件。
本篇論文使用 Sentaurus TCAD 元件模擬軟體進行模擬分析，發現加入超晶格鰭片核心絕緣體的鰭式場效電晶體，在與傳統平面式 金氧半場效電晶體 具有相同鰭片寬度時，雖然通道的總載子數量較傳統鰭式場效電晶體少，但其表現更好的電特性，並且可以提高鰭片在製程中減少斷裂的能力，此提供鰭式場效電晶體在製程中之良率改善及特性提升。
FinFET plays a very important role in the current semiconductor industry, which has better electrical characteristics than MOSFET. Additionally, it provides superior gate control capabilities and enabling smaller layout areas. Nonetheless, narrower fins tend to collapse during the manufacturing process. For alleviating this problem, in this thesis, a superlattice fin core insulator is proposed, and the resultant FinFET with fin core insulator are characterized. In addition, various simulation parameters were conducted to evaluate their effects.
This thesis uses Sentaurus TCAD device simulation software to analyze and compare the performance of Fin Field-Effect Transistors (FinFETs) with and without the use of a superlattice fin core insulator. With the same fin width, the total amount of carrier in the FinFET with a superlattice fin core insulator is smaller than that in a conventional FinFET. However, the FinFET with core insulator can result in better electrical characteristics and also provides better protection against potential fin collapse during the manufacturing process.
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