透明導電薄膜(Transparent Conductive Oxides ，簡稱TCO)近二十年成為了半導體產業常用到的材料。由於同時具備透光性以及導電性，可以應用各種光電產業元件。目前最常使用的透明導電薄膜為銦錫氧化物(Indium Tin Oxide，簡稱ITO)，由於銦礦屬於稀有金屬故成本較高，加上近年面板產業以及太陽能電池產業越加興盛導致爭取ITO的供給，因此本實驗研究以同時具導電性以及透光性，且成本較低的氧化鋅鋁(ZnO: Al，簡稱AZO)薄膜作為取代材料，並以半導體製程製作並探討其作為熱敏電阻元件、太陽能電池元件以及生物感測元件的應用及討論。
本研究利用RF磁控式濺鍍(sputtering)法製備薄膜，調整製程參數得到具有導電性約0.170Ω-cm，以及透光率在可見光波長範圍400nm至700nm之間有平均85%透光率的AZO薄膜，並依此條件設計不同的光罩，製作出元件後討論結果。
首先，AZO薄膜作為熱敏電阻時展現了負溫度係數，其TCR值約為-0.4%至-0.5%之間，與Al的TCR值0.39%相近。其次，作為太陽能電池元件時有著受溫度變化而導致電阻變化的缺點，在一百五十度加溫二十小時後，電阻變化量約為5x105Ω，此現象在經過退火處理後得到改善。最後，作為量測血糖的生物感測元件，AZO薄膜與葡萄糖酵素之間的界面將會干擾酵素與葡萄糖所產生的電流，在濺鍍時的濺鍍瓦數有最佳值的選取，為驗證介面對實驗影響，研究進一步使用AZO奈米線來觀測變化，得知AZO奈米線越多得到的背景電流越大，將蓋過感應電流。在最佳值瓦數的條件所做的生物感測元件，感應電流對葡萄糖濃度成線性關係。

Transparent Conductive Oxides (TCO) is a common material in the semiconductor industry, since its high visible transmittance and conductance can be used to produce electro-optical product. The most popular TCO material is Indium Tin Oxide (ITO),but Indium is a kind of rare metals which has high cost. Because there is a high demand in TCO, this thesis chose ZnO:Al(AZO) which has high transmittance and conductance as a replace material to produce thermistor, solar cell device, and biosensor.
In this thesis, AZO thin film is prepare by sputtering. The conductance of AZO thin film is 0.170Ω-cm, and the transmittance is 85% in the 400nm to 700nm wavelength. Base on the condition, experience design different mask to prepare different device then discuss the result.
First of all, AZO thin film as thermistor has negative Temperature coefficient of Resistivity (TCR) which is between -0.4% to -0.5%.It is close to TCR of Al which is 0.39%. Second, the conductance of AZO thin film as solar cell device change with temperature. The difference of resistance is 5x105Ω at 150 OC after 20 hours. The solution is anneal the AZO thin film by 200 OC in 30 minutes. Third, AZO thin film as biosensor to detect glucose concentration has a problem that the environmental current is over the current of generate by glucose and glucose oxide(GOD). The cause is by the interface of GOD and AZO thin film, so the experience change the interface by growing AZO nano wire on the AZO thin film. The increasing nano wire lead more environment current which will overlap the current of generate by glucose and GOD. The current of generate by different concentration of glucose show linear result.

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