氫氣(H2)因其高度易燃性而被歸屬於有害氣體，當其於大氣下達4-7重量百分濃度時，即具有相當之危險性，存在爆燃的風險，且由於其無色無味，大大提升檢測管線洩漏之難度，也因此奠定了其感測器存在之必要性及重要性。近年來，金屬氧化物由於其優異的化學和物理性質被廣泛應用於此領域，如：ZnO、WO3、TiO2、SnO2、MoS2等。

以金屬鎢為基材之複合材料被廣泛應用於感測器氣敏層相關研究中，因其對多種目標有毒氣體具高度之靈敏性。而三氧化鎢(WO3)應用於氫氣感測器之先例，因此本研究之第一部分將專注於還原氧化鎢(WO2.72)於此領域之應用的研究。以三氧化鎢為原材料，應用鍛燒法合成還原氧化鎢奈米粒子(WO2.72)，並通過FE-SEM、XRD和Raman光譜進行樣品表徵確認。待合成完成，以旋塗方式完成感氣層於SiO2/Si晶圓之塗佈，並完成叉指式電極之沉積。經測試，WO2.72感測器於室溫條件下之感測能力為27%，且具備於500ppm濃度條件下長期穩定性及重複使用性。同時以電子耗盡層理論說明其機制。

儘管銫鎢青銅(CsxWO3)已被廣泛應用於其他領域，但其並無作為氫氣感測器氣敏層材料之先例，因此本研究之第二部分延續對金屬鎢為基材之複合材料的研究，欲開發當前尚無相關研究之鎢青銅(MxWO3)於此領域之應用的研究，CsxWO3感測器之製程，以水熱法先行完成銫鎢青銅奈米棒的合成，並透過多項儀器鑑定其物理性質以確保結構之型態，並以旋轉塗佈之技術將之形成薄層結構於SiO2/Si晶圓之上，完成感氣層製備，隨後完成橫向多指Pt電極，以利後續性能檢測測試。經測試於不同濃度之氫氣(10ppm至500ppm)，測試結果呈現，銫鎢青銅感測器於室溫下具優異的感測性能(31.3%)，並且優於WO3感測器(4.7%)。選擇性測試亦呈現優異結果，於氨氣及二氧化碳測試中僅有極低之響應。此材料具備可靠性、合成方法簡單、濕度影小及選擇性優異等優勢，大大提升其應用之可行性。且與WO3感測器相比，CsxWO3感測器具更為優異的表面吸附能力及更強的活性O2官能基電誘導能力，因而展現了增強的氣敏性。當前CsxWO3感氣層展現優異的效能，成功證實MxWO3作為金屬氧化物氣體感應器之可行性。

於第三部分研究中，成功以溶劑熱法合成新型CsxWO3/MoS2奈米複合材料，再次採用旋轉塗佈之技術，完成於SiO2/Si晶圓形成感氣薄層結構之操作，並以PVD技術沉積設計之叉指式電極完成感測器製備。經測試，CsxWO3/MoS2感測器可於室溫下展現優異的氫氣感測能力，尤其包含15wt.% MoS2 (15 % CsxWO3/MoS2)之奈米複合材料，其感測性能甚至可達51%。此外，因具有高度循環穩定性，更增添其於實際應用的優勢。
於本篇之最後一項研究，預期導入先進技術，以Zirconium-based metallic glass nanotube arrays為基材，於其上透過實驗參數設定，完成氧化鋅(ZnO)奈米棒之生長，並以此材料做為氫氣感氣層之應用。於具contact-hole陣列(孔徑為2 µm)之光阻劑形成之模板上濺鍍沉積metallic glass (Zr60Cu25Al10Ni5)以得異質Zirconium-based metallic glass nanotube arrays，並沉積ZnO種子層以提供成核位點以利於metallic glass nanotube arrays內部生長奈米棒狀結構，其後採水熱法完成ZnO奈米棒之生長，接著濺鍍Pt電極，以利後續性能檢測測試。經實驗證實，Fabricated Zirconium-based metallic glass nanotube arrays with ZnO nanorods (Zr-ZnO-nanorods)具優異的氫氣傳感性能。

Among different harmful gases, hydrogen(H2) is one of the toxic gas with flammable nature when mixed with air 4-7%. So, it's necessary to sense such gas which is tasteless and odorless. Metal oxide-based gas sensors have acquired consideration lately because of their reasonable compound and actual properties. There are many oxide-based sensors such as ZnO, WO3, TiO2, SnO2, MoS2, etc. which have been utilized for the recognition of hydrogen gas until now.
Tungsten-based materials are one of the most widely utilized gas sensing materials due to their high sensitivity towards toxic gases. Tungsten trioxide have already been used in hydrogen gas sensors. In the first part, Reduced tungsten oxide nanoparticles (WO2.72) were synthesized from tungsten trioxide by calcination method. The prepared samples were systematically characterized via field-emission scanning electroscope (FE-SEM), X-ray diffraction (XRD), and Raman spectroscopy. Then, the prepared WO2.72 was spin coated on Si/SiO2 substrates, and the sensor was developed with interdigital electrodes. The result shows that fabricated WO2.72 sensor possess excellent H2 gas sensing response of 27% at room temperature. Moreover, the WO2.72 sensor exhibited outstanding long-term stability and repeatability at 500 ppm. The hydrogen gas sensing mechanism the developed sensor was explained based on the electron depletion layer.
Tungsten bronze (MxWO3) which was not read up for hydrogen detecting conduct up until this point. Cesium tungsten bronze (CsxWO3) is one of the popular tungsten bronze materials which was read up for various applications yet has never been utilized for hydrogen detecting applications. The CsxWO3 nanorods were blended by an effortless aqueous strategy and uncovered by precise material examinations. Above all, the blended CsxWO3 nanorods were turn covered on SiO2/Si substrates, hence manufactured sidelong multi-finger Pt-based anodes to test the gas identifying properties. The gas recognizing property of the pre-arranged material was examined towards extremely poisonous hydrogen gas (10ppm to 500ppm focus). The gas detecting result presents that the combined CsxWO3 material has amazing gas detecting property towards hydrogen (31.3%), which is predominantly better compared to as pre-arranged WO3 (4.7%) because of its great electrical property at room temperature. The selectivity results additionally show that the material has extraordinary selectivity towards hydrogen when contrasted and various gases like Ammonia and carbon dioxide. The significant highlights of this material are its unwavering quality, straightforward blend technique, less mugginess impact, and great selectivity, which creates it a suitable open door for its utilization as a hydrogen sensor. Contrasted with the as-arranged WO3, the adsorption capacity and conductance of the CsxWO3 surface incite the dynamic O2 useful gatherings that sturdily improve the gas detecting properties. The present CsxWO3 mix is interesting and proficient that prepares to future possibilities on the hybridization and creation of WO3 based metal oxide gas sensors.
In the third session of work, Hydrogen gas sensors are significant due to the critical utilization of hydrogen in modern and business applications. In this work, we integrated an original CsxWO3/MoS2 nanocomposite utilizing a solvothermal strategy. The examples were turn covered on Si/SiO2 substrates, and the sensors were manufactured with interdigital terminals. The hydrogen gas detecting properties of the sensor was explored. CsxWO3/MoS2 displayed a remarkable hydrogen gas detecting capacity at room temperature. Specifically, the nanocomposite involving 15 wt.% MoS2 (15 % CsxWO3/MoS2) showed a 51 % reaction to hydrogen gas at room temperature. Further, it displayed incredible cyclic soundness for hydrogen gas detecting, which is significant for functional applications. Along these lines, this study works with the improvement of successful and effective hydrogen gas sensors operable at room temperature.
In the final part, we report on Zinc oxide (ZnO) nanorods grown on Zirconium-based metallic glass nanotube arrays for hydrogen gas sensing applications. The synthesis of the heterogeneous Zirconium-based metallic glass nanotube arrays was done by sputter deposition of metallic glass (Zr60Cu25Al10Ni5) over contact-hole arrays created by a photoresist template with a diameter of 2 µm. To provide the nucleation sites to grow the nanorods inside Zirconium-based metallic glass nanotube arrays, the ZnO seed layer was deposited. The ZnO nanorods were grown by hydrothermal method. The sample was then sputtered with Pt electrodes to see hydrogen sensing results. Fabricated Zirconium-based metallic glass nanotube arrays with ZnO nanorods (Zr-ZnO-nanorods) showed good sensing results towards hydrogen gas.

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