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研究生: 何俊明
Jiun-mimg He
論文名稱: 沉澱去除光電廢水中磷酸鹽之研究
Precipitation Removal of Phosphate from TFT-LCD Manufacturing Wastewater
指導教授: 劉志成
Jhy-chern Liu
口試委員: 黃志彬
Chih-pin Huang
李篤中
Duu-jong Lee
張維欽
Wei-chin Chang
顧洋
Young Ku
學位類別: 碩士
Master
系所名稱: 工程學院 - 化學工程系
Department of Chemical Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 英文
論文頁數: 99
中文關鍵詞: 光電廢水化學處理去除磷酸鹽磷化鈣磷化鎂氫氧基磷灰石
外文關鍵詞: Chemical precipitation
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本實驗主要目的在於利用沉澱法去除光電業蝕刻廢水中磷酸之可行性,利用鈣鹽及鎂鹽等四種化合物為沉澱劑。酸鹼值與濃度莫耳比為主要的參數,探討最適當之操作條件。同時利用電子掃描顯微鏡與X光繞射分析對單體顆粒表面進行微觀的定性分析。

結果顯示,酸鹼值與濃度莫耳比均為扮演重要的參數。以鈣鹽而言,過量的鈣鹽可獲得理想的移除效果。然而,酸鹼值必須控制在8.5至10.5之間。相形之下,鎂鹽在移除的整體表現上低於鈣鹽,但是鎂鹽較不受氟離子干擾,因此對磷酸鹽具較佳選擇性。

沉澱物定性分析結果顯示,磷酸鈣沉澱物形式主要隨著酸鹼值而變化。在酸性環境,主要以磷酸二鈣(dicalcium phosphate dihydrote, DCPD)為主要形成;在中性而言,結晶的氫氧基磷灰石(hydroxyapatite, HAP)以及非結晶HAP為主要優勢物種;鹼性中之沉澱物均為非結晶HAP的形式存在;但是高於酸鹼值11.5之環境氫氧化鈣將生成,導致移除效率降低。以鎂鹽而言,沉澱物均以磷酸三鎂(bobierrite)呈現,高於酸鹼值11.5,則氫氧化鎂將生成,導致移除效率的降低。

由本研究之結果可知,以沉澱法去除含磷酸鹽之廢水之效果非常好。除此之外,所生成之沉澱物具有很高的潛力回收再利用。因此非常適合應用在光電廢水中去除磷酸鹽之操作程序。


e etching wastewater from thin film transistor liquid crystal display (TFT-LCD) manufacturers contains high concentration of phosphate. The aim of this thesis was to investigate the feasibility of phosphate removal from TFT-LCD wastewater by precipitation with calcium and magnesium salts. Optimal operating conditions were determined. Besides , field-emission scanning electron microscope (FE-SEM) and X-ray diffraction (X-RD) were used in characterization of precipitates.
Both pH value and molar ratio of metal to phosphate play important roles in precipitation of phosphate. For calcium salts, excess dosage resulted in higher removal efficiency of phosphate. However, the pH value must be controlled between 8.5 and 10.5. Magnesium salts showed lower removal efficiency when compared to calcium salts. Yet, they were more selective in phosphate removal when in the presence of fluoride.
The results of precipitate characterization showed that the dominant phase of calcium phosphates precipitates depended on the pH value. When at pH value of 5.5, the dominant phase was found to be dicalcium phosphate dihydrate (DCPD), while hydroxyapitite (HAP) predominantly formed between a pH of 6.5 and 10.5. It was observed that bobierrite was predominantly formed between pH of 8.5 and 10.5 when magnesium salts were used.
Result from the study indicated that the removal efficiency of phosphate by precipitation was satisfactory. Besides, the precipitates were potentially reusable as fertilizers. The method is promising for application on phosphate removal from TFT-LCD wastewater.

Table of Content 中文摘要……………………………………………………………………………………I Abstract……………………………………………………………………………………II Acknowledgment……………………………………………………………………………lII Table of Content…………………………………………………………………………lV List of Figures……………………………………………………………………………Vl List of Tables……………………………………………………………………………X Chapter 1 Introduction1 1.1 Background 1 1.2 Objective 2 Chapter 2 Literature Review 3 2.1 TFT-LCD industry in Taiwan 3 2.2 Wastewater from TFT-LCD manufacturers 6 2.3 Phosphorus 7 2.4 Current techniques for phosphate removal 8 2.4.1 Biological treatment 8 2.4.2 Chemical treatment 9 2.4.3 Magnesium salt precipitation 21 2.4.2 Crystallization treatment 23 Chapter 3 Materials and Methods 24 3.1 Source of etching wastewater from TFT-LCD 24 3.2 Chemicals for experiment 24 3.3 Equipments and Instruments 25 3.4 Experimental methods and procedures 26 3.5 Analysis Procedures 28 3.5.1 Turbidity 28 3.5.2 pH Meter 28 3.5.3 Zeta Potential 29 3.5.4 Total Solid and Total Suspended Solid 29 3.5.5 Energy dispersion X-ray spectroscopy (EDS) 29 3.5.6 Ion chromatograph (IC) 30 3.5.7 X-Ray Diffraction 30 3.5.8 Fluoride selective electrode 30 3.5.9 PHREEQC Version 2 31 Chap 4 Results and Discussion 33 4.1 Characteristics of TFT- LCD wastewater 33 4.2 The effect of pH value and molar ratio on phosphate removal 40 4.2.1 First wastewater 40 4.2.2 Second wastewater 44 4.2.3 Third wastewater 44 4.3 Particle size 54 4.4 The measurement of zeta potential 55 4.5 Residual concentration of fluoride 66 4.6 The property of precipitate 70 Chapter 5 Conclusions and Suggestions 89 References 91 Appendix 99 List of Figures Figure 2-1 TFT-LCD manufacturing processes 4 Figure 2-2 TFT-LCD array manufacturing processes 5 Figure 2-3 Various species of phosphorous at different pH and 25℃ 17 Figure 2-4 Ions necessary for the growth of HAP 19 Figure 2-4 Metastable zone for calcium phosphate crystallization according to pH and phosphorus concentration 21 Figure 3-1 Block diagram of experiments 26 Figure 3-2 The process of chemical precipitation for experiments 27 Figure 4-1A EDS and SEM for raw wastewater No.2 35 Figure 4-1B EDS and SEM for raw wastewater No.2 36 Figure 4-1C EDS and SEM for raw wastewater No.2 37 Figure 4-1D EDS and SEM for raw wastewater No.2 38 Figure 4-2 Particle size distribution of TFT-LCD wastewater No.1 and No.2 ..39 Figure 4-3 Residual PO43- as a function of the molar ratio for CaCl2 dosage and first wastewater 47 Figure 4-4 Residual PO43- as a function of the molar ratio for Ca(OH)2 dosage and first wastewater 47 Figure 4-5 Residual PO43- as a function of the molar ratio for MgCl2 dosage and first wastewater 49 Figure 4-6 Residual PO43- as a function of the molar ratio for MgO dosage and first wastewater 49 Figure 4-7 Residual PO43- as a function of the molar ratio for CaCl2 dosage and second wastewater 50 Figure 4-8 Residual PO43- as a function of the molar ratio for Ca(OH)2 dosage and second wastewater 50 Figure 4-9 Residual PO43- as a function of the molar ratio for MgCl2 dosage and second wastewater 51 Figure 4-10 Residual PO43- as a function of the molar ratio for MgO dosage and second wastewater 51 Figure 4-11 Residual PO43- as a function of the molar ratio for CaCl2 dosage and third wastewater at pH6.5 52 Figure 4-12 Residual PO43- as a function of the molar ratio for CaCl2 dosage and third wastewater at pH8.5 52 Figure 4-13 Residual PO43- as a function of the molar ratio for CaCl2 53 Figure 4-14 Particle size distribution of wastewater No.2 for treated by CaCl2 and Ca(OH)2 dosage for wastewater No. 3 56 Figure 4-15 Particle size distribution of wastewater No.2 for treated by Ca(OH)2 56 Figure 4-16 Particle size distribution of wastewater No.2 for treated by MgCl2 57 Figure 4-17 Particle size distribution of wastewater No.2 for treated by MgO 57 Figure 4-18 Comparing particle size distribution of wastewater No.3 for treated by CaCl2 and Ca(OH)2 at molar ratio of 1.0 58 Figure 4-19 Comparing particle size distribution of wastewater No.3 for treated by CaCl2 and Ca(OH)2 at molar ratio of 2.5 59 Figure 4-20 Influence of molar ratio and pH on zeta potential using CaCl2 for wastewater No.1 60 Figure 4-21 Influence of molar ratio and pH on zeta potential using Ca(OH)2 for wastewater No.1 61 Figure 4-22 Zeta potential for untreated bobierrite Ca(OH)2 62 Figure 4-23 Influence of molar ratio and pH on zeta potential using MgCl2 for wastewater No.1 63 Figure 4-24 Influence of molar ratio and pH on zeta potential using MgO for wastewater No.1 64 Figure 4-25 Zeta potential for untreated bobierrite 65 Figure 4-26 Residual concentration of fluoride as a function of the molar ratio at pH 10.5 for wastewater No.1 67 Figure 4-27 Residual concentration of fluoride as a function of the molar ratio at pH 8.5 and 10.5 for second wastewater 68 Figure 4-28 Residual concentration of fluoride as a function of the molar ratio at pH 8.5 and 10.5 for second wastewater 69 Figure 4-29 XRD of a sludge obtained in the wastewater No.1 treated with CaCl2 at difference pH 72 Figure 4-30 XRD of a sludge obtained in the wastewater No.1 treated with Ca(OH)2 at difference pH 73 Figure 4-31 XRD of a sludge obtained in the wastewater No.3 treated with MgCl2 at difference pH 74 Figure 4-32 XRD of a sludge obtained in the wastewater No.3 treated with CaCl2 at difference pH 75 Figure 4-33 Speciation of phosphate species predominant in solution for Ca / PO4 molar ratio of 0.5 76 Figure 4-34 Speciation of phosphate species predominant in solution, for Ca / PO4 molar ratio of 1.5 76 Figure 4-35 Speciation of phosphate species predominant in solution, for Ca / PO4 molar ratio of 2.5 77 Figure 4-36 Speciation of phosphate species predominant in solution, for Mg / PO4 molar ratio of 0.5 77 Figure 4-37 Speciation of phosphate species predominant in solution, for Mg / PO4 molar ratio of 1.5 78 Figure 4-38 Speciation of phosphate species predominant in solution, for Mg / PO4 molar ratio of 2.5 78 Figure 4-39 SEM and EDS of precipitate obtained in the wastewater No.1 treatment with CaCl2 at pH 6.5: 30K (A) and 100K(B) 81 Figure 4-40 SEM of precipitate obtained in the wastewater No.2 treated with Ca(OH)2 at pH 6.5 82 Figure 4-41 SEM of precipitate obtained in the wastewater No.1 treated with CaCl2: pH 6.5 (A), pH 8.5(B) and pH 10.5(C) 83 Figure 4-42 SEM and EDS of precipitate obtained in the wastewater No.1 treatment with MgCl2 pH 8.5: 4k (A) and 20k(B) 84 Figure 4-43 SEM of precipitate obtained in the wastewater No.1 treated with MgCl2: pH8.5 (A), pH9.5(B) and pH10.5(C) 85 Figure 4-44 SEM of precipitate obtained in the wastewater No.3 treated with CaCl2 at pH 8.5: CaF2 (A), FAP(B) and HAP(C) 86 Figure 4-45 EDS of precipitate obtained in the wastewater No.3 treated with CaCl2 at pH 8.5: CaF2 (A), FAP(B) and HAP(C) 87 Figure 4-46 Certain SEM images of crystal from reference were employed to comparing with this study 88 List of Tables Table 2-1 Properties of the TFT-LCD inorganic wastewater 6 Table 2-2 The different forms of crystallized calcium phosphate are presented in 11 Table 2-3 Calcium phosphates and their molar ratios and solubilities in TFT-LCD manufacturer 12 Table 4-1 Characteristics of TFT-LCD wastewater 34 Table 4-2 The concentration of fluoride at different date 44 Table 4-3 Phosphate removal by CaCl2, at different molar ratio 46 Table 4-4 Phosphate removal by Ca(OH)2, at different molar ratio 46 Table 4-5 Phosphate removal by MgCl2, at different molar ratio 48 Table 4-6 Phosphate removal by MgO, at different molar ratio 48 Table 4-7 The 2 θ angles of various species 71

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