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研究生: 楊巧詣
Chiao-Yi Yang
論文名稱: 銲墊表面處理層開發暨顯微組織分析
Surface finish engineering and microstructure analysis for solder joints
指導教授: 顏怡文
Yee-Wen Yen
莊鑫毅
Hsin-Yi Chuang
口試委員: 高振宏
Cheng-Heng Kao
陳志銘
Chih-Ming Chen
丘群
Chun Chiu
學位類別: 碩士
Master
系所名稱: 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年: 2021
畢業學年度: 109
語文別: 中文
論文頁數: 117
中文關鍵詞: 覆晶製程表面處理有機保銲層(OSP)ENEPIGSAC銲料Innolot銲料
外文關鍵詞: Flip Chip(FC), Surface finish, Organic solderability protectant(OSP), ENEPIG, SAC solder, Innolot solder
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摘要 III Abstract IV 誌謝 VI 目錄 VIII 圖目錄 X 表目錄 XIII 第一章、前言 1 第二章、文獻回顧 3 2-1 電子構裝技術 3 2-1.1 電子構裝簡介 3 2-1.2 覆晶製程之簡介 4 2-1.3 回銲技術 5 2-2 界面反應與擴散動力學 7 2-2.1 界面反應 7 2-2.2 擴散理論 8 2-3 界面反應相關文獻 10 2-3.1 經界面反應形成介金屬相之體積收縮 10 2-3.2 表面處理層 11 2-3.3 金脆現象 13 2-4 相平衡 15 2-4.1 Cu-Sn二元系統相平衡圖 16 2-4.2 Ni-Sn二元系統相平衡圖 18 2-4.3 Cu-Ni二元系統相平衡圖 19 2-4.4 Cu-Ni-Sn三元系統相平衡圖 19 2-4.5 Ag-Sn二元系統相平衡圖 21 2-4.6 Au-Sn、Pd-Sn二元系統相平衡圖 22 第三章、實驗方法 25 3-1 銲墊表面處理層之磁性材料結構最佳化 25 3-1.1 時效熱處理 25 3-1.2 回銲反應 26 3-1.3 冷熱循環測試 26 3-1.4 試片金相處理 26 3-1.5 界面觀察與分析 27 3.2 表面處理層暨銲料組成對介金屬相成長及元件可靠度影響評估 29 3-2.1 試片前處理 29 3-2.2 試片金相處理 30 3-2.3 界面觀察與分析 30 第四章、結果與討論 32 4-1 銲墊表面處理層之磁性材料結構最佳化 32 4-1.1 樣品對照組 32 4-1.2 150°C時效熱處理之界面反應 35 4-1.3 180°C時效熱處理之界面反應 44 4-1.4 200°C時效熱處理之界面反應 52 4-1.5 回銲試驗之界面反應 60 4-1.6 冷熱循環測試 67 4-1.7 比較樣品可靠度 73 4-2 表面處理層暨銲料組成對介金屬相成長及元件可靠度影響評估 75 4-2.1 顯微結構及相組成 75 第五章、結論 81 參考文獻 82 附錄 86

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