為滿足潔淨室流場均勻及能耗降低的需求，本研究將針對其送風系統設備FFU來進行改良，使其具備高性能、高效率、及出風高均勻度等要求，首先參考AMCA 210-99之實驗規範對FFU進行性能量測，確定模擬與實驗結果具一致性後，再藉由流場可視化功能探討其內部流場缺失，並根據流場缺失提出可行的改善方案。改善的參數包括有葉片護罩、入口圓錐體、中心體、翼形葉片、內部流道、及出口等部分，模擬結果顯示原型FFU經葉片護罩、入口圓錐體、中心體、與翼形葉片等部分的改良之後，性能方面最大流量比原型FFU多出了10％，最大靜壓也提升了2.5％，而效率方面最高效率點的值也比原型FFU高出約10％左右，緊接著加入流道與出口部分的改良設計，藉此改善流道開口逆流與出風口氣流不均勻等現象，改善之後雖會使先前性能提升的幅度產生些許下降，但出風口正向流出區域的面積比例從原來36.2％增加到61.5％，且與原型FFU相比性能方面最大流量仍有4.2%的增加，最大靜壓有7.2%的增加，而效率方面最高效率點的值也還有將近8%的提升，整體來看各方面都比原型FFU優異許多。如此修正與改善原型FFU之設計，可提供一套具系統化與科學性的分析結果，作為將來生產製造時的建議及參考依據。

This numerical research aims to investigate the flow field associated with FFU (fan filter unit) system for enhancing the uniform distribution at discharge and its efficiency, which are essential for fulfilling the requirements on uniform flow distribution and operation cost reduction for the clean room. At first the FFU is tested at an AMCA wind tunnel to attain the aerodynamic performance, which is used to compare and validate the corresponding numerical simulation. Next, the CFD result is utilized to visualize and identify the shortcoming of flow field inside the FFU. Based on these deficiencies, the improving alternatives considered here can be classified into the flow-path-related modifications and the rotor-related parameters, such as the shapes of shroud and inlet bell, the reducing height of rotor, and the additions of central body and airfoil blade. With the implement of these rotor-related modifications, the maximum flow rate, static pressure, and maximum efficiency are increased by 10%, 2.5%, and 10%, respectively. Thereafter, further improvements along the flow passage, such as the open area reduction on the original guiding plate and the addition of porous guiding plate close to FFU side plates, are adopted to reduce the reversed flow at open area on the guiding plate and to enhance the uniform velocity distribution at FFU discharge. An enhancement on uniform distribution is well demonstrated by increasing the effective area ratio at FFU outlet from 36.2% to 61.5%. In summary, this research successfully establishes a systematic and effective design scheme for the fan filter unit (FFU) via an integrated experimental and CFD effort.

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