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研究生: 張明智
Ming-chih Chang
論文名稱: 新型致動系統應用於無閥角錐式流道微幫浦之研發
Development of Valveless Pyramidal Micropump with using New Actuation System
指導教授: 鄭逸琳
Yih-lin Cheng
口試委員: 張復瑜
Fuh-yu Chang
林怡均
Yi-jiun Lin
學位類別: 碩士
Master
系所名稱: 工程學院 - 機械工程系
Department of Mechanical Engineering
論文出版年: 2010
畢業學年度: 98
語文別: 中文
論文頁數: 117
中文關鍵詞: 無閥式微幫浦角錐式擴散器SDM技術
外文關鍵詞: valveless micropump, pyramidal diffuser, Shape Deposition Manufacturing
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  • 目前國內外對於微幫浦的相關研究大多數是以壓電片作為致動系統,所以本實驗室在先前研究裡也是採用此種致動器,然而經由先前的實驗結果發現壓電致動器具有高驅動電壓、振幅過小以及能量損耗大等問題。此外,無閥式微幫浦入口流道的逆流問題也會影響微幫浦的性能。因此,本研究發展一種新型的致動系統用來取代壓電致動器,並且利用在腔室內部設計固定止回閥體來減少回流的情況。SDM (Shape Deposition Manufacturing)製程為一種層加工技術 ,利用來製作微幫浦流道與腔室特徵。
    利用小型DC馬達作為新型的致動系統,透過傳動組件將馬達的旋轉運動轉換成往復式運動來改變腔室體積的變化。新型致動系統的振動情形相似於壓電致動器,但其振動幅度較大,頻率低,所需驅動電壓可從50V降至9V。這種新型的致動系統證實了能夠利用在先前研究的角錐式無閥微幫浦上,也能應用於文獻上的平壁式微幫浦。流量測試結果得出擴散角20°、傾斜角20°之微幫浦在頻率60Hz下,最大流量可達4283.99μl/min。此外,兩個固定止回閥體的設計,以減少回流的影響進行研究,其結果在設計一的閥體可增加約三分之一的流量。


    Most researches in valveless micropump utilized piezoelectric actuators, so did previous studies in our laboratory. However, the piezoelectric actuator has problems of high driving voltage, too small amplitude, and large energy consumption. Besides, the existence of back flow of the valveless micropump affects micropump’s performance. Therefore, this research developed a new actuation system to replace piezoelectric actuator, and designed fixed valves in the chamber of the micropump to reduce back flow situations. SDM (Shape Deposition Manufacturing) process, a layered manufacturing technique, was used to fabricate micropump channels and the chamber.
    A miniature DC motor was used in the new actuation system. Through a transmission mechanism, the rotational movement of the motor became reciprocating motion to increase and decrease chamber’s volume in each cycle. The result of this new actuation system was similar to the vibration of piezoelectric actuator, but the amplitude was higher, the frequency was lower, and the required voltage was only 9V instead of 50V. This new actuation system was proved to be able to actuate our previous valveless pyramidal diffuser micropump designs and flat-walled diffuser pump in the literatures. The maximum flow rate of the pyramidal micropump with diffuser angle of 20 degrees and inlet slant angle of 20 degrees was 4283.99μl/min at 60Hz. Moreover, two fixed valve designs to reduce back flow effects were investigated. As a result, the design 1 could increase about one-third of the flow rate.

    摘要I AbstractII 致謝III 目錄IV 圖目錄VII 表目錄XIV 符號表XVI 第一章 緒論1 1-1 前言1 1-2 研究目的與方法 2 1-3小型DC馬達致動微幫浦之設計概念4 1-4 論文架構5 1-5 微幫浦之類型介紹6 1-5-1 微幫浦簡介6 1-5-2 微閥門之探討6 1-5-2-1 有閥式6 1-5-2-2 無閥式8 1-5-3 致動器之探討9 1-6 文獻回顧14 第二章 相關理論21 2-1 無閥式微幫浦基本原理21 2-2 擴散器/噴嘴之設計22 第三章 新型致動系統29 3-1 新型致動器之設計30 3-2 小型直流伺服馬達的選用33 3-3 直流馬達轉速控制方式34 3-4 致動系統硬體架構35 3-4-1 微控制器36 3-4-2 直流馬達驅動器37 3-4-3 程式撰寫39 第四章 微幫浦之設計與製作42 4-1 微幫浦之設計42 4-1-1 先前研究之設計42 4-1-2 固定閥體之設計45 4-1-3 平壁式微幫浦之設計47 4-2 SDM製程48 4-2-1 SDM加工原理48 4-2-2 切層規劃分析說明49 4-2-3 材料與設備50 4-2-3-1 SDM建構材料50 4-2-3-2 SDM製程設備與製作軟體54 4-3 微幫浦之製作61 4-3-1 角錐無閥式微幫浦之製作62 4-3-2 水平平壁式微幫浦之製作70 4-3-3 垂直平壁式微幫浦之製作75 4-3-4 移除支撐材料 80 4-4 微幫浦實際尺寸量測81 4-5 PDMS薄膜與致動器傳動組件之製作87 4-5-1 PDMS薄膜材料87 4-5-2 PDMS薄膜製作88 4-5-3 PDMS薄膜有限元素分析89 4-6 致動器傳動組件之製作91 第五章 微幫浦封裝與測試94 5-1 微幫浦封裝94 5-1-1 腔室封裝94 5-1-2 量測水管與微幫浦之封裝95 5-2 量測系統架構96 5-3 實驗操作流程97 5-4 微幫浦量測結果99 5-4-1 各類型微幫浦流量與背壓量測結果100 5-4-2 綜合比較108 5-4-3 各類型微幫浦之雷諾數110 5-5 實驗結果與相關文獻比較111 第六章 結論與未來展望116 6-1 結論116 6-2 未來展望117 參考文獻118 附錄1 先前研究之流量數據123 附錄2 FC52 Isocyanate/Polyol材料性質表126 附錄3 BIOACT 280材料性質表128 附錄4 角錐式流道壓力恢復係數(Cp)值實際推算133

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