現今微機電製程 (Micro-electro-mechanical system, MEMS) 發展成熟，已被運用在機械、電子、光學、生醫檢測等方面。透過MEMS可將微生物燃料電池 (Microbial fuel cell, MFC) 微小化，微小化之優點為反應快速、所需陽/陰極液量少、微小化後將有機會可植入人體內或是各種不易更換電池之小型設備做長期之供電。
本研究利用微影製程 (Photolithography) 製作出SU-8矽晶圓母模後再進行軟微影 (Soft lithography) ，利用聚二甲基矽氧烷(Polydimethylsiloxane, PDMS) 複製母模上之微結構，脫模後使用電子束蒸鍍鉻 (Cr) 及銀 (Ag) 金屬層做為陽/陰極電極。
微型微生物燃料電池電力輸出不佳，因此本研究嘗試將微型混合器 (Micromixer) 以及微柱 (Micropillar) 加入陽極槽體內以使陽極液充分混合且透過微柱結構增加電極表面積，藉此提升電能輸出；同時本研究也探討加入電子傳遞介質對微生物燃料電池輸出之影響。
本研究之微生物使用酵母菌，並且在微生物燃料電池中加入微結構以及陽極液中添加電子傳遞介質，可獲得最大電流66.545μA/cm2、最大功率3.284μW/cm2以及內阻值2.569kΩ。

Nowadays, the development of Micro-electro-mechanical system (MEMS) is mature, which has been used in machinery, electronics, optics, biomedical examinations and other fields. Through MEMS, microbial fuel cell(MFC) can be miniaturized. Several advantages of miniaturization includes rapid reaction, reduction of anolyte/catholyte consumption and suitable for body implantation as a long term power source for implanted bioMEMS devices.
This study use photolithography process to manufacture SU-8 silicon wafer as mold. After that PDMS will be poured onto the mold to replicate the microstructures of the mold. Finally, E-Beam evaporation process is used to deposit Cr and Ag layers as electrodes.
The performance of μMFC is not sufficient for practical applications. This study embed micromixers and micropillars into anode for mixing of anolyte and increasing surface area to improve electricity output. Also, the influence of addition of electron mediator is discussed.
In this study, s. cerevisiae is used as the anode microorganism in the μMFC with embedded micromixers and micropillars. The μMFC can generate maximum current density of 66.545μA/cm2, maximum power density of 3.284μW/cm2 and reduce the internal internal resistance to 2.569kΩ.

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