本研究探討壓電材料於水聲元件之幫浦結構耦合流體振動並造成流率的量測與分析，幫浦應用四片壓電圓柱薄殼以不同電極設計的模態振形作動推動流體，透過多種實驗量測及數值計算的研究方法得知壓電材料於不同流體時以不同電極設計作動的共振頻率及共振模態。研究主要探討壓電圓柱薄殼在與空氣和水耦合作動下影響的流固耦合振動特性，並設計兩種不同腔室大小的壓電幫浦進行比較，兩者設計皆是利用四片壓電圓柱薄殼結合PDMS高分子薄膜管形成類似自由邊界的形式，在共振頻率下驅動而產生位移進而改變腔體體積，使液體因腔體機變化而增加流體的流量。本研究之壓電元件與流體耦合的振動特性使用三種量測設備進行實驗量測，包括全域式電子斑點干涉術（Electronic Speckle Pattern Interferometry, ESPI），同時對壓電材料於流體中的面內與面外振動狀態進行即時量測，紀錄壓電材料與不同流體時耦合作用下的共振頻率與振動模態，雷射都卜勒振動儀（Laser Doppler Vibrometer, LDV）以單點量測壓電材料與流體耦合的面外振動位移，並可使用穩態掃頻的方式獲得壓電幫浦於流固耦合的面外共振頻率，阻抗分析儀則針對壓電材料的電性進行量測，主要獲得面內耦合面外振動的共振頻率與反共振頻率。本研究對壓電圓柱薄殼耦合不同流體的振動特性進行量測，所有的實驗量測結果皆與固液耦合的有限元素數值計算進行分析比較，無論在共振頻率或振動模態皆可相互對應，對於壓電材料的動態特性於實驗量測與數值分析皆進行比較，成功獲得壓電元件於流體上與流體內的振動特性。最後，本研究將得到的振動特性結果應用於兩種不同的壓電幫浦中，並在開放式流道系統探討與水作用下共振頻率及振動模態對於壓電幫浦流量與流速的影響，對於不同的壓電幫浦設計在水中的流固耦合共振頻率及振動模態提供完整且豐富的資訊。

The solid-liquid coupled vibration characteristics of piezoelectric material was investigated on pump structures when piezoelectric actuator used on hydroacoustic devices. Four piezoelectric cylindrical shells were applied the electrode design method to cause different motions pushing and pulling fluids in pumps. Experimental measurements and finite element numerical calculations were used to determine the resonant frequencies and mode shapes of electrode designs for piezoelectric cylindrical shells, which could be used to promote the flow of air and water. Two different chamber sizes of piezoelectric pumps were designed to verify the solid-liquid coupled vibrations of piezoelectric elements using on pumps with piezoelectric cylindrical shells located above the surface of the fluid under quasi-free boundary. Both of designs have four piezoelectric cylindrical shells bonded to PDMS polymer membrane tube, such that resonant vibrations produce changes in the volume of the chamber, which increases the flow of fluid. Three experimental techniques were used to determine the solid-liquid coupled vibration characteristics. Electric speckle pattern interferometry (ESPI) was used to measure the resonant frequencies and mode shapes associated with out-of-plane and in-plane vibrations of piezoelectric material interacting with fluids. Second, a laser Doppler vibrometer (LDV) was used to obtain the frequency spectrum of vibrating displacement using dynamic signal swept-sine analysis. The third experiment involved analyzing impedance in the piezoelectric elements in order to identify the resonant frequencies and anti-resonant frequencies of the piezoelectric material under the influence of a fluid. The vibration coupling characteristics of piezoelectric cylindrical shells coupled with different fluids were determined by experimental measurements and the results were verified with finite element numerical calculation. Whether resonant frequencies or mode shapes in this fluid-structure coupled system, the dynamic characteristics of the piezoelectric materials have good consistence between experimental and numerical results. Finally, the results of vibration characteristics, which were obtained from this study, were applied to two different piezoelectric pumps. The effects of resonant frequencies and vibration modes on the flow rate of piezoelectric pump were discussed in open flow channel system. It provides complete information on the solid-liquid vibration characteristics of different piezoelectric pump designs.

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