本研究旨在開發一閉迴路微/奈米定位系統，系統主要元件包含以有限元素分析設計之具位移放大機構之微/奈米定位平台、壓電致動器、光纖干涉儀量測系統、PC等，系統以LabView程式語言撰寫程式作定位系統之整合控制。
本研究利用對稱式橋型位移放大機構設計，以ANSYS有限元素分析軟體進行設計上的靜態及動態分析，並完成局部尺寸最佳化的設計。
依據實驗結果，所研製之定位平台其位移可達50 μm，三軸之旋轉角最大為3.43〞。此定位平台經測試後，在以PC based下所建立的閉迴路PID控制系統，步階定位能力可控制在10 nm，斜坡追蹤速度為50 nm/s。
此整合系統之特點在於結構與控制邏輯簡單，並藉由光纖干涉儀量測系統作位置回授之閉迴路控制系統，能在短時間內達到高精度控制的功能，對發展自主性之完整奈米定位系統建立關鍵研發基礎。

The objective of this research is to develop a PC-based closed loop micro-/nano-positioning system. The developed system mainly consists of a piezoelectric actuator, a bridge mechanism for displacement magnification, a micro-/nano-positioning stage body analyzed by the FEM software ANSYS, an optical fiber interferometer system, and a PC. A set of software written with the LabView programming language was developed to construct the PID closed-loop control of the developed positioning system.
A bridge displacement amplification mechanism has been de-signed to enlarge the travel of PZT actuator. After executing the optimization analyses of the displacement, stress, and the fre-quency, using the ANSYS software, the dimensions of the stage body have been designed and determined.
Based on the test results, the designed closed loop mi-cro-/nano-positioning system was capable of precision positioning within the travel of 50μm. The positioning capability was about 10 nm under the slope tracing speed of 50 nm/s by the PC-based PID control. The maximum pitch error of the stage moving along x-direction was about 3.43 arc-seconds.

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