本文第一部分之研究，旨在發展一套高響應、高能源效率的電液泵控伺服系統。傳統的液壓伺服系統中，閥控系統具有高響應之優點，但能源效率較低；而傳統泵控伺服系統雖然具有較高的能源效率，但在響應上卻遠不及閥控系統快。因此，本文研究即是以AC伺服馬達搭配定排量柱塞泵，組成一個變轉速泵控液壓伺服系統(VRS-PCS)，並與變排量泵控液壓伺服系統(VD-PCS)作性能上之比較。在系統控制方面，以「適應性距離基礎之模糊滑動模式控制 (ASDFC-STFSMC)」來設計控制器。ASDFC-STFSMC 結合了「適應性距離基礎模糊控制器」與「自調適模糊滑動模式控制器」，因此可以降低規則庫的維度並且可以自動調整規則庫參數以及補償切換力，使控制器能有效處理系統的動態變化，以得到較佳的控制性能。藉由ASDFC-STFSMC控制理論來設計控制器，實現 VRS-PCS 及 VD-PCS 液壓伺服系統之位置、軌跡、速度及力量控制。經實驗驗證，VRS-PCS在系統響應及能源使用效率上有相當不錯的表現，並且比VD-PCS 有較佳之控制性能。
本文第二部分之研究，旨在發展大行程高精度之氣壓-壓電混合定位系統，此系統將氣壓伺服系統與壓電致動器結合成為氣壓-壓電混合定位系統。由伺服氣壓缸進行大行程、高響應的粗定位，再以壓電致動器進行小行程的精密定位補償，因此可以達到大行程、高響應、高精度之目標。此一氣壓-壓電混合定位系統是一個二進一出之控制系統架構，因此在控制方面，先後採用「適應性離散可變結構控制理論 (ADVSC) 」以及「解耦合自組織模糊滑動控制器 (DSOFSMC)」來設計控制器。ADVSC 結合了自調適適應性控制及離散可變結構控制，因此控制參數可於線上自我調整，將系統推向最佳滑動平面，並且降低可變結構控制中的振顫現象。解耦合自組織模糊滑動控制器(DSOFSMC)包括一個自組織模糊滑動控制器 (SOFSMC)及一個解耦合控制器。自組織模糊滑動控制器藉由滑動平面的使用，可以大幅降低模糊規則庫的規則數及複雜度，並藉由自組織修正器的應用，彌補模糊規則庫設計時，因專家經驗不足及環境因素所造成的誤差。此外，解耦合控制器可以依據誤差及誤差變化量，於線上調整氣壓與壓電兩個子系統之權重分配，解決二進一出系統之間的耦合問題。本文所發展之氣壓-壓電混合定位系統，經實驗驗證，以ADVSC控制器控制時，於最大定位行程180mm時，可達0.1μm之定位精度。以DSOFSMC控制器控制時，於最大定位行程250mm時，可達20nm之定位精度。

Hydraulic systems have the advantages of high power-weight ratio, large driving forces, and high robustness. However, improving the response and energy-efficiency of hydraulic servo systems are essential problems. On the other hand, pneumatic systems have the advantages of high response, less expense and cleanliness. However, the non-linearity nature of pneumatic systems restricts positioning precision. Thus, this dissertation focuses on two researches: improving the response and energy-efficiency of hydraulic servo systems, and developing a high precision positioning control pneumatic systems.
Part I of this dissertation develops an electro-hydraulic pump-controlled system for achieving high response and high energy-efficiency. The conventional hydraulic valve-controlled systems have high response but low energy-efficiency. Hydraulic pump-controlled servo systems have high-energy efficiency. However, the conventional pump-controlled systems have lower response. Therefore, this dissertation aims to develop a high response and high-energy efficiency electro-hydraulic pump-controlled system driven by a constant displacement piston pump with a variable rotational speed AC servomotor. Furthermore, the servo performance of the variable rotational speed pump-controlled system (VRS-PCS) is investigated experimentally in comparison with that of the variable displacement pump-controlled system (VD-PCS).
A novel adaptive signed-distance fuzzy controller with self-tuning fuzzy sliding-mode compensation (ASDFC-STFSMC) is proposed for motion control of pump-controlled systems. The ASDFC-STFSMC combines the adaptive signed-distance fuzzy control with the self-tuning fuzzy sliding-mode control scheme. Thus, fuzzy rules can be reduced in number and adjusted automatically. Furthermore, the function approximation error of equivalent controller can be compensated for improving control performance. Subsequently, the motion controls of VRS-PCS and VD-PCS controlled by ASDFC-STFSMC are implemented respectively, which experimental results clarify that the VRS-PCS realizes the performance of both high response and high energy-efficiency. In addition, the performances of VRS-PCS are superior to that of VD-PCS in the motion controls.
Part II of this dissertation investigates a novel pneumatic-piezoelectric hybrid positioning control system that contains a pneumatic cylinder and a piezoelectric actuator combined in cascade. The pneumatic cylinder positions with high speed and large strokes. The piezoelectric actuator positions in fine strokes to compensate for the influence of friction force. Thus, the pneumatic-piezoelectric hybrid control system can achieve large strokes, high response, and high positioning precision.
The control strategies of the pneumatic-piezoelectric hybrid positioning control system are designed and verified in experiments using adaptive discrete variable structure controls (ADVSC) and decoupling self-organizing fuzzy sliding mode controls (DSOFSMC) in sequence. The ADVSC combines self-tuning adaptive controls and discrete variable structure controls, thus the control parameters can be adapted on-line to achieve an optimum sliding surface and reduce the chattering phenomenon of variable structure control. The DSOFSMC contains a self-organizing fuzzy sliding mode control (SOFSMC) and a decoupling controller. Thus, it can decrease the fuzzy rule numbers, on-line self-organize the fuzzy rules and on-line weight the two subsystems. Subsequently, the pneumatic-piezoelectric hybrid positioning control is implemented, which experimental results clarify that, the positioning precision of the pneumatic-piezoelectric hybrid system controlled by ADVSC can reach 0.1 μm with high response for the strokes of 10 mm and 180 mm. Furthermore, the pneumatic-piezoelectric hybrid system controlled by DSOFSMC can achieve positioning precision of 20 nm with high response for stroke of 250 mm.

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PART II
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