熱噴塗氧化鋁製程提供了中高功率散熱模組之導熱絕緣層一種新的製作方法。傳統網印製程之氧化鋁/銅複合材料，由於製程限制使得氧化鋁塗層厚度無法降低，在高溫下與銅材之間有剝落的現象產生，導致氧化鋁塗層熱阻抗值增加，崩潰電壓減低。另一方面，本研究探討電漿熱噴塗氧化鋁/銅高導熱複合材料中，噴塗氧化鋁的顆粒大小、塗層厚度及塗層表面粗糙度對熱阻抗值以及崩潰電壓的影響。其中可觀察出最低的熱阻抗值、表面粗糙度及穩定的崩潰電壓值的氧化鋁塗層之噴塗功率為40 kW、粉末顆粒尺寸為22~45 μm、塗層厚度為20 μm、粉末速度為750 m/s、Ar氣流量為45 L/min、噴塗距離為140 mm及噴塗角度為90度。同時也發現，氧化鋁塗層的熱阻抗值會隨其表面粗糙度的增加而增加；以及厚度40 μm之氧化鋁塗層的崩潰電壓值受水氣的影響較大。

Thermal spray coating of alumina onto copper offers a new alternative in the production of substrates for high power modules.The particle size of alumina, the coating thickness, and the consequent surface roughness if the alumina layer were found to play important roles on the thermal resistance and breakdown voltage of the substrate of composite-layered structure. In the process variables investigated in this study, the combination of a lowest surface roughness, a lowest thermal resistance, and a highly reliable breakdown voltage was attained when spray-coated layer of about 20 μm in thickness was achieved by spray coating an alumina powder having particle size ranging between 22 and 45 μm under the conditions of a power of 40 kW, a spraying velocity of 750 m/s, an argon flow rate of 45 L/min, a praying distance of 140 mm, and a spraying angle of 90◦. It was also found that the thermal resistance of the composite layer increased with the increase in surface roughness. Even with a coating thickness as large as 40 μm, the breakdown voltage was still greatly influenced by the moisture content in the alumina dielectric layer.

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