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研究生： 陳曉帆
Siao-Fan Chen
論文名稱： 以陰極電弧鍍膜系統鍍製氮化鉻/氮化鋯奈米多層薄膜之研究
The study of nanostructured CrN/ZrN multilayer thin films prepared by Cathode Arc Deposition System
指導教授： 王朝正
Chaur-Jeng Wang
口試委員: 李志偉
Jyh-Wei Lee
周賢鎧
Shyan-Kay Jou
學位類別： 碩士
Master
系所名稱： 工程學院 - 機械工程系
Department of Mechanical Engineering
論文出版年： 2011
畢業學年度： 99
語文別： 中文
論文頁數： 131
中文關鍵詞： 氮化鉻/氮化鋯奈米多層薄膜 、陰極電弧鍍膜 、雙層週期厚度 、機械性質
外文關鍵詞： Nanostructured multilayer coatings, Cathode Arc Deposition System, bilayer period, mechanical properties
相關次數： 點閱：217  下載：2 
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  •  上一筆

    • 本研究以陰極電弧鍍膜系統於矽晶片與碳化鎢基材上鍍製共五種氮化鉻/氮化鋯奈米多層薄膜，藉著改變試片在真空腔體內的轉速以控制薄膜的雙層週期厚度。本研究利用低掠角X光繞射儀進行薄膜層之晶相分析，以原子力顯微鏡分析薄膜表面之表面形貌，掃描式電子顯微鏡分析薄膜表面與截面形貌，及奈米壓痕儀及微小維克氏硬度儀，pin-on-disk磨耗試驗機分析薄膜之機械性質，由實驗結果發現，五種奈米多層薄膜之雙層週期厚度皆控制在5-30 nm之間，薄膜厚度介於550至600nm。各多層薄膜硬度均高於單層薄膜者，而試片編號為A5 (=30nm)之奈米多層薄膜有最高之硬度與最低的摩擦係數。

    Five nanostructured CrN/ZrN multilayer coatings were deposited periodically by the Cathode Arc Deposition System (CAD6-1). We used to change the rotational speed to control the thinkness of the bipolar periodically of the CrN/ZrN thin film. The crystalline structure of multilayer coatings was determined by a glancing angle X-ray diffractometer. Microstructures of thin films were examined by an atomic force microscopy (AFM), scanning electron microscopy (SEM), respectively. A nanoindenter , a micro Vickers hardness tester and pin-on-disk wear tests were used to evaluate the hardness, fracture toughness and tribological properties of the thin films, respectively. It was found that the bipolar periodically thinkness of CrN/ZrN multilayer coatings were controlled within the range from 5 to 30 nm and the thinkness were at the range from 550 to 600 nm. All the hardness of multilayer thin films were higher than single layer and the sample A5(=30nm) multilayer have the maximum hardness and the minimum coefficient of friction.

    致謝………………………………………………………………………………….i 中文摘要…………………………………………………………………………...iii 英文摘要…………………………………………………………………………...iv 表目錄………………………………………………………………………………v 圖目錄……………………………………………………………………………...vi 第一章 緒論………………………………………………………………………..1 1.1 前言…………………………………………………………………….1 1.2 研究動機與目的……………………………………………………….2 第二章 文獻回顧…………………………………………………………………..3 2.1 陰極真空電弧濺鍍系統……………………………………………….3 2.1.1 陰極真空電弧鍍膜………………………………………………5 2.1.1.2 真空電弧(Vacuum arcs) ……………………………………5 2.1.1.3 微顆粒(Macroparticles) …………………………………….5 2.1.1.4 磁濾管(filter) ………………………………………………..6 2.1.1.5 氮化鉻/氮化鋯 奈米多層薄膜……………………………..7 2.2 氮化鉻薄膜…………………………………………………………….8 2.2.1 氮化鉻薄膜特性…………………………………………………8 2.2.2 氮化鉻薄膜組成…………………………………………………9 2.3 氮化鋯薄膜…………………………………………………………...10 2.3.1 氮化鋯鍍膜性質………………………………………………..10 2.3.2 基材偏壓效應對ZrN的影響…………………………………..10 2.3.3 沉積溫度對ZrN的影響………………………………………..11 2.4奈米多層薄膜………………………………………………………….11 2.4.1 奈米多層薄膜之分類…………………………………………..11 2.4.1.1 相同結晶結構多層薄膜 (Isostructural multilayer)……….11 2.4.1.2 相異結晶結構多層薄膜(Non-isostructural multilayer)…...12 2.4.1.2.1 氮化物/氮化物多層薄膜……………………………….12 2.4.1.2.2 金屬/氮化物多層薄膜………………………………….13 2.5 多層薄膜強化機制…………………………………………………...13 2.6奈米多層薄膜之韌性提升機制………………………………………17 2.7銑刀切削試驗研究……………………………………………………18 2.8熱循環效應之影響……………………………………………………19 第三章 實驗方法…………………………………………………………………20 3.1 實驗流程……………………………………………………………...20 3.2 實驗方法與步驟……………………………………………………...22 3.2.1 基材試片規格與前處理………………………………………..22 3.2.2 實驗設備………………………………………………………..23 3.2.3 鍍膜製程………………………………………………………..23 3.3 鍍膜性質分析………………………………………………………...25 3.3.1 成份分析實驗…………………………………………………..25 3.3.2 表面與橫截面分析試驗………………………………………..26 3.3.3 X光繞射分析試驗………………………………………………26 3.3.4 硬度試驗………………………………………………………..27 3.3.5 附著性試驗……………………………………………………..28 3.3.5.1 洛氏C壓痕試驗法……………………………………….28 3.3.5.2 刮痕試驗………………………………………………….29 3.3.6 破斷韌性試驗…………………………………………………..30 3.3.7 磨耗試驗………………………………………………………..31 3.3.8 銑刀切削試驗研究……………………………………………..32 3.3.9 熱循環效應之影響……………………………………………..33 第四章 結果與討論………………………………………………………………36 4.1 不同雙層週期厚度的氮化鉻/氮化鋯奈米多層膜薄膜性質分析…..36 4.1.1 晶相及微結構分析……………………………………………..36 4.1.1.1 成份分析………………………………………………….36 4.1.1.2 晶相分析………………………………………………….38 4.1.1.3微結構分析………………………………………………...38 4.1.2 機械性質分析…………………………………………………..49 4.1.2.1 硬度分析………………………………………………….49 4.1.2.2 破斷韌性分析…………………………………………….51 4.1.2.3 磨耗性質分析…………………………………………….56 4.1.2.4 洛氏(Rockwell-C)附著性分析…………………………...59 4.1.2.5 刮痕試驗附著性分析…………………………………….63 4.1.3 銑刀切削試驗分析……………………………………………..66 4.2調整鍍製參數的氮化鉻/氮化鋯奈米多層薄膜之薄膜性質分析….72 4.2.1 晶相及微結構與硬度分析……………………………………72 4.2.1.1 成份分析…………………………………………………...72 4.2.1.2 晶相分析…………………………………………………...74 4.2.1.3微結構分析………………………………………………….75 4.2.2 機械性質分析…………………………………………………..83 4.2.2.1 硬度分析…………………………………………………...83 4.2.2.2 破斷韌性分析……………………………………………...84 4.2.2.3 磨耗性質分析……………………………………………...88 4.2.2.4 洛氏(Rockwell-C)附著性分析…………………………….92 4.2.2.5 刮痕試驗附著性分析……………………………………...95 4.2.3銑刀切削試驗分析………………………………………………..98 4.2.4熱循環試驗分析…………………………………………………102 4.2.4.1 晶相分析………………………………………………….102 4.2.4.2微結構分析………………………………………………..103 4.2.4.3薄膜表面形貌與成分分析………………………………...107 4.2.4.4 洛氏(Rockwell-C)附著性分析…………………………...115 4.2.4.5 刮痕試驗附著性分析…………………………………….117 第五章 結論……………………………………………………………………..122 參考文獻…………………………………………………………………………126 附錄………………………………………………………………………………131

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