本論文在設計與製作三種主動光學元件之功能性鏡面鍍膜，包括共振腔發光二極體介電質布拉格反射鏡、垂直共振腔面射型雷射介電質布拉格反射鏡、晶體光纖光源的入射端面雙波段鍍膜。使用MACLEOD作為設計軟體，薄膜的材料為SiO2與TiO2，使用此兩種高低折射率材料堆疊不同厚度而形成所需的特定反射率頻譜，以電子槍蒸鍍系統蒸鍍薄膜，並觀察製鍍前後，元件各種特性的比較。共振腔發光二極體在完成製鍍後，室溫、連續波操作下，發光頻譜半高寬收窄至4到6nm，半功率角從一般LED的60°收窄為45°左右，光輸出功率為未鍍膜前1.2~1.5倍以上，其中20um直徑元件在25mA操作電流時可達0.53mW光輸出功率，目前是受熱效應限制、還未封裝，且元件可在環境溫度達313K時仍穩定工作。垂直共振腔面射型雷射元件完成上層布拉格反射鏡製鍍後，可以觀察到元件在室溫、連續波操作下雷射現象的產生，閾值電流能下降至領先目前其他研究團隊的0.5mA附近，峰值波長約分布在407nm到411nm左右，元件半高寬可達0.4nm到0.6nm，旁模抑制比11dB以上，發散角約為6°的單模雷射。最後晶體光纖部份，雖然頻寬在鍍膜後由185nm拓寬為221nm，但光輸出功率並未如預期上升，判斷是製程中端面受汙染導致薄膜不夠平整與龜裂現象產生。

This study focused on the design and fabrication of functional mirror coatings for three active optical components including the dielectric distributed Bragg reflector (DBR) of Resonant Cavity Light Emitting Diode (RCLED), the dielectric DBR of Vertical-Cavity Surface-Emitting Laser (VCSEL), and the dichromatic mirror on the input facet of an optically pumped crystal fiber light source. We used MACLEOD as the design software, and SiO2 and TiO2 as the coating materials in designing a multi-layer thin film to attain a specific reflectance spectrum by alternatively stacking the two materials of different refractive index and of designed thickness.
The characteristics of the three active components before and after the mirror coating deposition by using e-gun evaporation were compared as follows: for the RCLED, the FWHM of its emitting spectrum was reduced from ~16nm to 4-6nm, the half-power angle was reduced from 60∘of traditional LEDs to approximately 45∘, the light output power was 1.2 to 1.5 times higher than that before coating and 0.53mW was obtained from the 20um-diameter RCLED under 25mA without heat-sinking packaging, and the emission peak wavelength remained stable up to a temperature of 313K. As for the VCSEL diodes, after the completion of its top dielectric DBR, lasing was observed under continuous-wave operation at room temperature. The threshold current was as low as 0.5mA, ahead of other research groups. Its peak wavelength ranged from 407 nm to 411 nm, the FWHM was only 0.4nm to 0.6nm, the side mode suppression ratio was above 11dB, and the divergence angle was about 6∘for 3um-diameter VCSEL. Single-mode VCSEL was realized. Finally, for the crystal fiber light source, although the emission band width was increased from 185nm to 221nm after the coating, the light output power was not increased as expected, which was attributed to unwanted particles deposited on the facet during the fabrication resulting in an uneven coating with several cracks near the fiber core.

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