兩個單晶CMOS微波加熱器已使用0.18奈米CMOS製成製作，其中微波由LC振盪器產生，而溫度感測器用來偵測溫度。感測器的溫度偵測範圍從-10 ℃ 到 35 ℃，其靈敏度為35 mV/℃。激活微波加熱器的關鍵在於透過時變電場觸發極性分子運動。當含有極性分子的代測物被置放至於加熱器的電感上方加熱30分鐘，成功使待測物的溫度上升1.4℃

Two monolithic microwave heaters have been fabricated in 0.18-μm CMOS process, where the microwave is generated by an LC oscillator, while temperature sensors are used for temperature detection. The temperature detection range of the temperature sensors is from -10 ℃ to 35 ℃, where the temperature sensitivity of sensors is 35 mV/℃. The key to activate the microwave heater is triggering the motions of polar molecules with time-varying electric field. When the phantom with polar molecules is placed above the inductor of the heater, its temperature is successfully raised by 1.4 ℃ in 30 minutes.

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