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研究生: 邱宣諺
Hsuan-yen Chiu
論文名稱: 雷射加工透明導電膜製程參數最佳化之研究
Research on the Optimization of the Transparent Conductive Oxide Films Processing Parameters Using Laser Technology
指導教授: 郭中豐
Chung-Feng Kuo
口試委員: 蘇德利
none
黃昌群
Chang-Chiun Huang
向四海
Su-Hai Hsiang
陳耿明
Keng-Ming Chen
學位類別: 碩士
Master
系所名稱: 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年: 2009
畢業學年度: 97
語文別: 中文
論文頁數: 150
中文關鍵詞: 觸控面板透明導電膜雷射田口方法灰關聯分析法模糊推論倒傳遞類神經
外文關鍵詞: Touch panel, transparent conductive oxide films, Laser, Taguchi method, Grey relational analysis, Fuzzy inference system, Back-propagation neural network
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  • 觸控面板與我們日常生活息息相關,舉凡手機、提款機、導航系統等都可看到觸控面板的應用。而透明導電膜為觸控面板的關鍵材料之一。在製造過程中其加工參數會影響觸控面板之精確度及導電性,為了達到精確的加工品質,本研究以三種不同波長的雷射(紫外光雷射波長355nm、飛秒雷射波長800nm、二氧化碳雷射波長10640nm)來切割透明導電膜,研究不同波長的雷射切割之控制參數與品質特性之關係。
    首先,利用田口方法中的直交表規劃實驗,選定透明導電膜之加工品質特性為切割後之線寬、熱影響區以及切割後所造成凸塊的大小。再依田口直交表進行實驗,實驗完成後所得到的各品質數據,依照各品質特性分別計算出信號雜訊比(Signal-to-noise ratio, S/N ratio),再將信號雜訊比經由灰關聯生成進行數據前處理,並藉由灰關聯數據值來建構控制參數與各品質之間的關係,結合模糊推論系統整合多品質特性問題來求出最佳解,達到最佳參數水準之組合。最後使用倒傳遞類神經網路結合Levenberg-Marquardt演算法建構出預測系統來模擬實驗結果,經由實驗驗證其預測誤差均在5%以內,證明此預測系統可以有效預測雷射加工透明導電膜。


    The touch panel is widely used in mobile phones, cash machines, navigation systems. The transparent conductive oxide films are one of the key materials for touch panel. The processing parameters will affect the electrical conductivity of touch panel. In this study three different laser wavelengths (UV-laser wavelength of 355nm, femtosecond laser wavelength 800nm and carbon dioxide laser wavelength 10640nm) were used to cut a transparent conductive oxide films and to obtain optimal quality characteristics of transparent conductive oxide films.
    Taguchi method orthogonal array was applied to plan the experiment. The quality characteristics of transparent conductive oxide films, such as cutting width, heat affected zone and burrs, were chosen. Next signal-noise ratio (SN) and analysis of variance (ANOVA) were adopted to examine the significant factors for transparent conductive oxide films. Moreover, grey relational analysis and fuzzy inference system were used to get optimum conditions for multi-quality characteristics. Lastly, a predicting system was established to simulate the results of experiment by using back-propagation neural network with LM algorithm. For the results of experimental verification, it indicated that the prediction error is less than 5%. These reveal that the prediction system has good forecasting ability.

    摘要I AbstractIII 誌謝IV 第1章緒論1 1.1研究動機與目的1 1.2文獻回顧2 1.3論文大綱7 1.4研究流程8 第2章雷射加工9 2.1雷射原理9 2.1.1雷射的由來9 2.1.2雷射產生過程10 2.1.3雷射光的特性及應用13 2.2雷射切割15 2.2.1雷射切割原理15 2.2.2雷射切割特點16 2.2.3雷射切割條件的選擇18 2.3觸控面板介紹20 2.3.1電阻式觸控面板21 2.3.2電容式觸控面板23 2.3.3音波式觸控面板24 2.3.4光學式觸控面板25 2.3.5電磁感應式觸控面板25 第3章研究方法27 3.1田口方法27 3.1.1直交表28 3.1.2品質特性的種類30 3.1.3控制因子主效果分析32 3.1.4變異數分析33 3.1.5確認實驗35 3.2灰色系統理論之灰關聯分析38 3.2.1灰關聯分析原理38 3.2.2建立序列之可比性39 3.2.3灰關聯分析40 3.3模糊理論41 3.3.1模糊集合42 3.3.2歸屬函數的種類43 3.3.3模糊推論系統45 3.4倒傳遞類神經網路結合LM演算法47 3.4.1倒傳遞類神經網路架構47 3.4.2倒傳遞類神經網路運算48 3.4.3Levenberg-Marquardt演算法49 第4章實驗方法及步驟51 4.1實驗規劃51 4.1.1實驗材料52 4.2實驗設備53 4.2.1CO2雷射53 4.2.2UV雷射55 4.2.3飛秒雷射57 4.2.4雷射功率量測器(Power meter)59 4.2.5光學顯微鏡61 4.2.6三維輪廓儀62 4.3實驗流程64 第5章結果與討論66 5.1雷射切割透明導電膜實驗配置66 5.2CO2雷射切割透明導電膜實驗數據70 5.2.1CO2雷射切割線寬分析71 5.2.2CO2雷射切割熱影響區分析73 5.2.3CO2雷射切割凸塊分析75 5.2.4CO2雷射切割透明導電膜分析77 5.2.5CO2雷射確認實驗81 5.3UV雷射切割透明導電膜實驗數據86 5.3.1UV雷射切割線寬分析86 5.3.2UV雷射切割熱影響區分析88 5.3.3UV雷射切割凸塊分析90 5.3.4UV雷射切割透明導電膜分析92 5.3.5UV雷射確認實驗96 5.4飛秒雷射切割透明導電膜實驗數據101 5.4.1飛秒雷射切割線寬分析101 5.4.2飛秒雷射切割熱影響區分析103 5.4.3飛秒雷射切割凸塊分析105 5.4.4飛秒雷射切割透明導電膜分析107 5.4.5飛秒雷射確認實驗111 5.4.6應用倒傳遞類神經之預測系統116 5.4.7數據正規化116 5.4.8倒傳遞類神經模式122 5.4.9檢驗預測效果123 第6章結論126 第7章未來展望129 參考文獻131

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