本研究是將銻化銦 (InSb) 塊材利用陽極氧化鋁 (AAO) 模板輔助真空壓鑄法製備一維結構奈米線，再將單根奈米線製備成熱電量測元件，以量測其熱電性質。使用陽極氧化鋁奈米模板作為鑄造模具，將預先熔煉的 InSb 合金塊材，注入 AAO 模板中，以製備奈米線；移除模板後並進一步確認奈米線之表面形貌、晶體結構與成份分析。結果顯示奈米線的直徑受到 AAO 孔徑所控制，且奈米線的晶體結構與塊材相同，但每根奈米線成分有細微的差異。接著將塊材與單根奈米線進行熱電特性與電性量測比較，結果顯示在300 K 環境溫度下，塊材的電阻率、塞貝克係數、功率因子、熱傳導率以及熱電優值分別為30 µΩ-m、-260 µV/K、2205 µW/m-K2、15.6 W/m-K 及0.044，奈米線的電阻率、塞貝克係數、功率因子、熱傳導率以及熱電優值分別為390.6 µΩ-m、-55 µV/K、7.9 µW/m-K2、1.79 W/m-K 及0.00138。其電阻率比塊材大，因奈米線表層仍具有氧化層，使得功率因子無法較小。從合金塊材製備為奈米線，因使得奈米尺度的晶體缺陷將提高內部聲子的散射機率，以達到降低材料的熱傳導率。由於氧化層的影響，並改善電阻率過高之問題，使用反應離子蝕刻來將氬離子轟擊奈米線氧化層，並增加處理時間，使得奈米線電阻率下降。由於製備奈米線冷卻快速，而為了減少奈米線本身之缺陷進而做熱處理，使電阻率下降。

In this study, the Indium Antimonide (InSb) bulk was fabricated into nanowires (NWs) with one-dimension structure by using vacuum injection molding process with the assistance of Anodic Aluminum Oxide (AAO) template. To evaluate the thermoelectric performance of nanoscale InSb, a single NW was then fabricated as a thermoelectric measuring component. By injecting the pre-melted InSb alloy individually into AAO template, NWs/AAO composite was obtained. In order to confirm the morphology, crystal structure and element composition of NWs, the AAO templates were removed to collect separated NWs. The analysis results showed that the diameter of NWs was similar to the pores size of AAO, and the crystal structure was also the same with bulk. The composition deviation between the bulk and NWs was resulted from non-uniform of element distribution in bulk alloy. As to thermoelectric properties, the resistivity, Seebeck coefficient, power factor, thermal conductivity and ZT value of the bulk alloy were 30 µΩ-m, -260 µV/K, 2205 µW/m-K2, 15.6 W/m-K and 0.044; while those were 390.6 µΩ-m, -55 µV/K, 7.9 µW/m-K2, 1.79 W/m-K and 0.00138 for NWs. The lower resistivity was resulted from the oxide shell formed during AAO removing process. The thermal conductivity would be decreased as the InSb bulk was nano-sized. In order to improve NWs resistivity, the Reactive-ion etching (RIE) processing time was increased, so that the resistivity was decreased. Furthermore, annealing process was carried out to eliminate the defects in NWs, which were caused by a rapid cooling rate while casting.

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