本研究旨在開發一套檢測球面微透鏡陣列之快篩式自動化光學系統，主要功能包含兩個部分，一為快速判斷陣列中個別微透鏡產品是否包含瑕疵，二為檢測陣列中個別微透鏡陣列之直徑及焦距是否符合規格。判別微透鏡瑕疵的方法是利用影像比對的方式，本研究使用商用的微透鏡陣列影像去比對需要檢測之微透鏡陣列之影像，將未達標準之微透鏡篩選出來。
系統之組成元件有紅光氦氖雷射、短焦與長焦擴束鏡組、偏振片、光圈、分光鏡、螺桿平台與馬達驅動設備以及CCD相機搭配遠心鏡頭。硬體架構能將雷射光經由擴束後，先透過偏振片與光圈增進雷射光的一致性，再經由分光鏡改變光路將光線投射於待測的微透鏡陣列上，再藉由CCD相機擷取影像，傳送給後端軟體程式分析處理。量測微透鏡陣列的直徑與焦距是透過擷取的影像尋圓，藉由比例因子換算得知個別微透鏡的直徑，接著移動CCD相機平台與分析微透鏡內部光斑面積大小，求出個別球面微透鏡的焦距。
在驗證本系統的效能實驗上，量測利用既有之商用微透鏡陣列為標準片，取像分析並演算，而後利用立體顯微鏡得到的量測數據推算樣本真實的直徑以及焦距。對比兩邊實驗結果，本研究自行開發的量測系統與工具顯微鏡的量測結果，在直徑誤差上小於4%以內，在焦距的量測結果上，實驗結果接近於商用標示規格的±3%。

An automated optical inspection system through rapid screening is developed in this study, which is used to: (1) detect flaw on the microlens array; and (2) measure the diameter and focus length of the microlens array. This inspection system consists of a laser beam, beam expansion system, polarizers, spectroscope and CCD camera.
In the detection of flaw on the microlens array, a CCD camera was used to capture the image of microlens array under the exposure of laser beam. Then the captured image was analyzed by an image-processing algorithm to highlight the defects, the method of distinguishing the defects of microlens array is to use pattern match, through the method of pattern match can screen out the flaw of microlens.
In the estimation of microlens array uniformity and the focal length of microlens array, an image-processing algorithm associated with the motorized X-Y table were used. To validate the measurement from the home-built inspection system, a stereomicroscope was used. The comparison between the home-built system and the stereomicroscope show a good agreement and proved that this optical inspection system for microlens array is highly useful.

[1] H. Golnabi, A. Asadpour, “Design and Application of Industrial Machine Vision Systems,” Robotics and Computer-Integrated Manufacturing, Vol.23, pp.630-637(2007).
[2] 鐘國亮，「影像處理與電腦視覺」，東華書局，第六版。
[3] 梁逸平，「熔融法折射式微透鏡陣列之設計製造與檢測」，國立中央大學光電科學研究所，碩士論文，(2001)。
[4] 黃文孝，「菲佐顯微干涉儀研製與應用」，中原大學機械工程學系，碩士論文，(2003)。
[5] C. Florian Charrière, “Characterization of microlenses by digital holographic microscopy,” Applied Optics, Vol.45, pp.829-835(2006).
[6] C. Quana, C. J. Tay, H.M. Shang, “Fringe Projection Technique for the 3-D Shape Measurement of a Hydroformed Shell,” Materials Processing Technology, Vol. 89-90, pp.88-91(1999).
[7] X. Zeng, H. Jiang, “Polydimethylsiloxane Microlens Arrays Fabricated Through Liquid-Phase Photopolymerization and Molding,” IEEE Microelectromechanical Systems, Vol.17, no.5(2008).
[8] T. Miyashita, “Standardization for Microlenses and Microlens Arrays”, Japanese Journal of Applied Physics, Vol.46, No8, (2007).
[9] X. Chen, K.T.V. Grattan, R. L. Dooley, “Optically Interferometric Roughness Measurements for Spherical Surfaces by Processing Two Microscopic Interferograms”, Measurement, Vol.32, No2, (2002).
[10] 傅書賢，「微型陣列透鏡表面形狀及曲率之顯微干涉光學檢測技術研究」，逢甲大學自動控制工程學系，碩士論文，(2011)。
[11] 銓州光電，http://www.onset-eo.com/
[12] 劉侑昕、林英欣、林世穆，「遠心鏡頭在機器視覺之應用」，台北科技大學光學系統研發中心，(2010)。
[13] 美商國家儀器台灣分公司，http://www.ni.com/zh-tw.html。
[14] 余俊宏，「生醫玻片影像掃描系統之研究」，國立台灣科技大學機械系，碩士論文，(2011)。
[15] 聖川實業有限公司，http://sagevision.com.tw/。
[16] 吳俊傑，「自動化光學微透鏡陣列檢測系統開發」，國立台灣科技大學機械系，碩士論文，(2017)。
[17] J. Luostarinen, M. Savolainen, K.E. Peiponen, P. Savander, “Microlens Array in Optical Inspection of Critical Surface Roughness of Cold-rolled Steel”, Optics and Laser in Engineering, Vol. 27, 429-433, (1997).
[18] 楊士緯，「微透鏡陣列三維型貌之光學顯微干涉自動化檢測系統」，逢甲大學電機工程所，碩士論文，(2012)。
[19] T.Anna, C. Shakher, D. S. Mehta, “Three-dimensional shape measurement of micro-lens arrays using full-field swept-source optical coherence tomography”, Optics and Laser in Engineering, Vol. 48, 1145-1151, (2010).
[20] C. Quan, S. H. Wang, C. J. Tay, I. Reading, Z. P. Fang, “Integrated optical inspection on surface geometry and refractive index distribution of a microlens array”, Vol. 225, 223-231, (2003).