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研究生: 張瑜恩
Yu-En Chang
論文名稱: 硒化銦摻雜物系列半導體 InSe:Ag, InSe:Zn與TlInSe2之晶體成長與光學特性研究
Indium selenide-based semiconductors InSe:Ag, InSe:Zn and TlInSe2-crystal growth and optical characterization
指導教授: 何清華
周宏隆
口試委員: 何清華
Ching-Hwa Ho
周宏隆
Hung-Lung Chou
李奎毅
Kuei-Yi Lee
趙良君
Liang-Chiun Chao
薛宏中
Hung-Chung Hsueh
學位類別: 碩士
Master
系所名稱: 應用科技學院 - 應用科技研究所
Graduate Institute of Applied Science and Technology
論文出版年: 2021
畢業學年度: 109
語文別: 中文
論文頁數: 106
中文關鍵詞: 化學氣相傳導法二硒化銦鉈硒化銦摻雜調制光譜拉曼霍爾量測
外文關鍵詞: Chemical vapor transport (CVT), TlInSe2, indium selenide doping, Thermoreflectance (TR), Raman, Hall effect
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中文摘要 I Abstract II 誌謝 IV 目錄 V 圖索引 VIII 表索引 XII 第一章 緒論 1 第二章 晶體成長 4 2.1晶體成長方法與原理 4 2.1.1 長晶反應系統 5 2.2長晶程序 7 2.2.1材料的製備 7 2.2.2石英管清洗作業 7 2.2.3化合物合成 7 第三章 實驗原理與量測系統 11 3.1X射線能量散佈分析儀 (EDS) 11 3.2X-Ray晶格繞射分析儀 (XRD) 14 3.3拉曼散射光譜 (Raman) 16 3.4 X射線光電子能譜儀 (XPS) 19 3.5光激發螢光光譜量測 (Photoluminescence, PL) 20 3.6熱調制反射光譜 (Thermoreflectance, TR) 23 3.6.1熱調制反射光譜簡介 23 3.6.2熱調制反射光譜樣品製備 25 3.6.3熱調制光譜系統的架設 25 3.7光穿透與吸收光譜 28 3.8照光之電壓電流量測 (Photo V-I) 30 3.9霍爾量測 (Hall Measurement) 32 第四章 結果與討論 34 4.1 能量散佈光譜儀 (EDS) 分析 34 4.1.1 InSe:Zn, InSe:Ag (EDS) 分析結果 34 4.1.2 TlInSe2 (EDS) 分析結果 37 4.2 X-Ray晶格繞射分析儀 (XRD) 分析 38 4.2.1 InSe:Ag,InSe:Zn (XRD) 分析結果 38 4.2.2 TlInSe2 (XRD) 分析結果 45 4.3拉曼散射光譜 (Raman) 分析 48 4.3.1 InSe:Ag, InSe:Zn (Raman) 分析結果 48 4.3.2 TlInSe2 (Raman) 分析結果 53 4.4 X射線光電子能譜儀 (XPS) 分析 55 4.4.1 InSe:Ag, InSe:Zn (XPS) 分析結果 55 4.4.2 TlInSe2 (XPS) 分析結果 59 4.5光激發螢光光譜 (PL) 量測分析 63 4.6熱調制光譜 (TR) 量測分析 65 4.6.1 InSe, InSe:Ag & InSe:Zn (TR) 分析結果 65 4.6.2 TlInSe2 (TR) 分析結果 71 4.7光穿透與吸收光譜 (Tr) 量測分析 73 4.7.1 InSe:Ag, InSe:Zn (Tr) 分析結果 73 4.7.2 TlInSe2 (Tr) 分析結果 77 4.8電壓-電流 (V-I) 曲線分析 79 4.9霍爾量測 (Hall Measurement) 82 第五章 結論 83 參考文獻 85

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