本研究以射出成形製作含微結構之非軸對稱非球面反射式光學元件(Reflective Optical Element, ROE)，利用射出成形模具之資料擷取系統與壓電致動器控制系統結合變模溫技術(Varithermo Mold Temperature, VMT)與微振動技術(Micro Vibratile, MV)方法。研究方法首先以巨觀尺度成形探討含微結構之非軸對稱非球面形狀誤差分析，模仁經優化設計形狀誤差為0.92μm。以微觀尺度成形探討三款塑料液晶聚合物(Liquid Crystalline Polymer, LCP)、聚碳酸酯(Polycarbonate, PC)、聚苯硫醚(Polyphenylene Sulfide, PPS)微結構表面形貌，其中LCP射出成形之ROE微結構表面形貌最佳。藉由壓電致動器輸入不同振動波形將影響微結構複製率，使用三角波複製率為57.14%，正弦波複製率為85.71%，方波複製率提昇至87.75%，結果皆優於傳統射出成形製程，在壓電致動器控制迴路系統，結果顯示壓電致動器頻率200Hz和振幅40V為理想工作狀態。ROE成品經光學頻譜檢測，成品出現聚焦跡象，雜散光比例約為3.3%，比先前研究改善74%。未來研究可發展壓電致動器閉迴路控制系統，有效提昇ROE之性能。

This study aims to fabricate a non-axisymmetric aspherical (NAA) reflective optical element (ROE) with micro-structure by injection molding process. The molding data acquisition and control system of piezo actuator have been integrated with micro vibratile (MV) and varithermo mold temperature (VMT) methods as a novel injection molding system. In macro scale, the non-axisymmetric aspheric form error (Rt) can be lowered to 0.92μm after optimization. The morphology microstructure surface of ROE in micro scale will be molded with three different plastics materials, which are liquid crystalline polymer (LCP), polycarbonate (PC), and polyphenylene sulfide (PPS). From the result of surface morphology of LCP ROE has shown the best surface quality during the process. Experimental results also show that with different piezo actuator waveform the micro groove filling ratio (GFR) is varied. The GFR of triangle wave is 57.14%, sine wave is 85.71%; and square wave is 87.75%. It is obviously to see that the ROE with MV-VMT is better than that by conventional injection molding process. In control loop system, the best parameters are as following, piezoelectric actuator frequency 200Hz and amplitude 40V. Last but not the least, the stray light in this study is 3.3%, which is better than previous study as improved 74%. Further study can focus on close-loop control system in order to augment the ROE performance.

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