研究生: |
吳俊傑 Chun-Chieh Wu |
---|---|
論文名稱: |
自動化光學微透鏡陣列檢測系統開發 Development of an Automatic Optical Inspection System for Microlens Array |
指導教授: |
陳品銓
Pin-Chuan Chen 鄧昭瑞 Geo-Ry Tang |
口試委員: |
陳品銓
Pin-Chuan Chen 鄧昭瑞 Geo-Ry Tang 修芳仲 Fang-Jung Shiou 陳亮光 Liang-kuang Chen |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2018 |
畢業學年度: | 106 |
語文別: | 中文 |
論文頁數: | 84 |
中文關鍵詞: | 自動化光學檢測系統 、微透鏡陣列 |
外文關鍵詞: | Automatic optical inspection system, microlens array |
相關次數: | 點閱:532 下載:6 |
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本研究旨在開發一套自動化檢測系統,主要功能包含兩個部分,一為快速判別微透鏡陣列產品是否具有瑕疵,二為量測微透鏡陣列之直徑及焦距。判別微透鏡陣列瑕疵的方法是利用透鏡的聚光性質,使得雷射穿過微透鏡陣列時形成光斑。藉由軟體程式對光斑影像進行分析判別,如發現瑕疵之後再記錄其位置。量測微透鏡陣列的直徑與焦距是透過擷取的影像尋圓,藉由比例因子換算得知微透鏡的直徑,接著利用移動CCD相機平台與分析微透鏡內部光斑圖塊尺寸,求出球形微透鏡的焦距。
本系統設備元件有紅光氦氖雷射、短焦與長焦擴束鏡組、偏振片、光圈、分光鏡、螺桿平台與馬達驅動設備、以及CCD相機。完成的硬體架構能將雷射光經由擴束後,先透過偏振片與光圈改善雷射光的一致性,再經由分光鏡改變光路之後將光線投射於待測的微透鏡陣列上,藉由CCD相機擷取影像傳送給軟體程式分析處理。
利用既有之樣本與外購之標準片,取像分析並演算。而後利用立體顯微鏡得到的數據推算樣本真實的直徑以及焦距。實驗結果顯示,系統自行開發的量測與工具顯微鏡所取得的直徑誤差位於5%以內,焦距誤差2mm與1mm樣品誤差小於4%,唯有0.5mm樣品誤差達到11%,因此本系統自行開發的量測方法與公據顯微鏡所取得的數據有一定程度的吻合。
An automatic inspection system is developed in this study, which is used to: (1) detect flaw on the microlens array (MLAS); and (2) measure the diameter and focus length of the MLAS. This inspection system consists of a laser beam, beam expansion system, polarizers, spectroscope and CCD camera.
In the detection of flaw on the MLAS, a CCD camera was used to capture the image of MLAS under the exposure of laser beam. Then the captured image was analyzed by an image-processing algorithm to highlight the defects. In the estimation of MLAS uniformity and the focal length of MLAS, an image-processing algorithm associated with the motorized X-Y table were used. To validate the measurement from the home-built inspection system, a stereomicroscope was used. The comparison between the home-built system and the stereomicroscope show a good agreement and proved that this optical inspection system for MLAS is highly useful.
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