本研究主要分為兩部分，第一部分為利用噴霧裂解法成長氧化鋅種晶膜，再藉由水熱法製備氧化鋅奈米桿，將其做為氣體感測元件，應用於檢測乙醇氣體(Ethanol gas)。第二部分主要藉由材料的改質以提升感測效能。本研究著重於氧化鋅晶格中的缺陷組成，對於感測特性的影響。
在乙醇氣體感測中，氣體和表面的氧離子反應，而氧離子的生成和氧化鋅中的氧缺陷有關，所以我們利用退火處理及電漿改質來改變材料中的缺陷組成，並以PL及XPS觀察氧化鋅中缺陷的變化，以期改善氧化鋅奈米桿的感測靈敏度。
氧化鋅奈米桿在螢光光譜的分析下擁有兩個較明顯的波峰，分別為~380 nm(UV放光)以及450~700 nm(缺陷放光)，其中缺陷放光的強度越強，表示奈米桿缺陷濃度越高，而這些缺陷經熱處理後皆有明顯的下降，但是經由氬氣退火後的奈米桿缺陷濃度，會隨著退火溫度的不同而有波鋒shift的現象，並且存在一最佳退火溫度450OC，
有效的提升氧化鋅奈米桿表面缺陷濃度，並提高感測的靈敏度。本研究也利用氧氣電漿處理的方式，提高表面吸附的氧離子以及相關的缺陷濃度，成功的提升了氧化鋅奈米桿的感測靈敏度。

This research project consists of two parts. In the first part, we deposited a ZnO thin film by spray pyrolysis, and then grew ZnO nanorods on the seed film by hydrothermal method. The resultant samples were then studied for ethanol gas sensing. In the second part, the ZnO nanorods were plasma-treated to modify the surfaces in order to improve the gas sensitivity. Our study focuses on the effect of defect composition on the gas sensing property.
For ethanol gas sensing, the ethanol molecule reacts with the surface oxide ion, and the formation of oxide ions can be correlated to the oxygen defects in ZnO. The defect composition can be varied by the thermal annealing as well as the plasma treatment. The changes in defect composition can be monitored by X-ray Photoelectron Spectroscopy (XPS) and Photoluminescence (PL) spectroscopy.
There are two peaks appeared in the PL spectrum, which are located at ~380 nm (UV emission) and 450~700 nm (defect emission), respectively. A large defect emission peak indicates a high defect concentration in the ZnO nanorod. In general, the defect concentration can be suppressed by thermal annealing in various atmospheres. However, annealing in Ar will increase the defect concentration and also cause a shift in the defect emission peak to an amount depending on the annealing temperature. An optimum temperature of 450OC was found for annealing in Ar to achieve the best ethanol gas sensitivity. We also can employ the oxygen plasma treatment to raise the concentration of surface adsorbed oxide ions, and to enhance the gas sensitivity of ZnO nanorods.

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