以蝕刻保護層製作大錐度比光纖透鏡研究｜國立臺灣科技大學博碩士論文系統

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研究生：	左偉宗 WEI-ZONG ZUO
論文名稱：	以蝕刻保護層製作大錐度比光纖透鏡研究 Fabrication of Fiber Lens with Large Taper Ratio using Safeguard Shell Etching Technique
指導教授：	鄭正元 Jeng-Ywan Jeng
口試委員:	汪家昌 Jia-Chang Wang 李三良 San-Liang Lee
學位類別：	碩士 Master
系所名稱：	工程學院 - 機械工程系 Department of Mechanical Engineering
論文出版年：	2006
畢業學年度：	94
語文別：	中文
論文頁數：	103
中文關鍵詞：	蝕刻、光纖透鏡
外文關鍵詞：	fiber lens, etch
相關次數：	點閱：386 下載：11
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上一筆

一般以化學蝕刻法所製作的單錐光纖透鏡，具有製作簡易快速、成本低廉等的優點。不過以此方式所製作的光纖透鏡會因為（A）其光纖錐角不夠大。（B）當光纖錐度大時，其光纖透鏡曲率半徑不夠小。（C）光纖光場與雷射不匹配的影響，造成光耦合效率偏低。本研究根據這些問題，提出一蝕刻保護層的方式。利用蝕刻保護層製作出具有微曲面的大錐度圓對稱型光纖尖錐，經過熔燒後，其形狀類似以雷射微車床法所製作之光纖。並在蝕刻保護層上製作特徵，蝕刻出具有大錐度比之光纖尖錐，經過熔燒後，其形狀類似研磨法所製作之光纖透鏡。
具有微曲面的大錐度圓對稱型光纖透鏡，以及大錐度比光纖透鏡，在相同的製作設備下，實驗對照組織一般單錐度光纖透鏡光耦合效率為30％，大錐度圓對稱型光纖透鏡為64％，大錐度比光纖透鏡為69％，證明以蝕刻保護層所製作之大錐度圓對稱型光纖透鏡與大錐度比光纖透鏡具有提升光耦合效率的效果，對於製作光纖透鏡應用在光纖通訊上，此方法增加了化學蝕刻法更高的實用性。

Chemical etching technique is commonly used to design the tapered fiber since it is simple, efficient, and inexpensive. However, the tapered fiber made by this technique has low coupling efficiency. Because of (A) the fiber’s taper is not large enough. (B)When the fiber’s taper is large, the curvature radius of fiber lens is not large enough. (C)The fiber mode field and the laser mode field are not matching. The research according to these questions is brought up the safeguard shell etching technique. Used the safeguard shell produces the fiber lens with large tapers round symmetrical type and micro curved surface. After melting, the fiber lens’ shape is similar to the fiber lens’ shape made by the laser micromachining.
Made features on the safeguard shell to etching the fiber produces the fiber lens with large taper ratio. After melting, the fiber lens’ shape is similar to the fiber lens’ shape made by the grinding technique. The coupling efficiency of the fiber lens with large tapers round symmetrical type and micro curved surface, and the fiber lens with large taper ratio are 64% and 69%. With the same fabricating plant, the coupling efficiency of the tapered fiber lens is 30%. The result indicated that the fiber lens with large tapers round symmetrical type and micro curved surface, and the fiber lens with large taper ratio could increase the effects of the coupling efficiency. This technique also enlarges the practicability of the chemical etching technique with respect to designing the tapered fiber lens in the optical fiber communication.

目錄
中文摘要.............................................I
英文摘要............................................II
誌謝...............................................III
目錄................................................IV
圖索引............................................VIII
表索引.............................................XIV
第一章 緒論..........................................1
1 前言.............................................1
2 研究背景.........................................2
3 研究動機與目的...................................3
4 論文架構.........................................5
第二章 文獻探討......................................6
1 光纖耦合技術之簡介...............................6
2 光纖透鏡製作法...................................9
2.1 光阻法........................................10
2.2 研磨法........................................11
2.2.1 楔型光纖透鏡................................12
2.2.2 新型四角錐型光纖透鏡........................14
2.3 UP-TAPER 法...................................15
2.4 熔燒抽絲法....................................16
2.5 熔接法........................................17
2.6 雷射微車床法..................................18
2.7 化學蝕刻法....................................18
2.7.1 改良化學蝕刻法之雙錐度光纖透鏡..............19
2.8 光纖透鏡製作法之比較..........................23
3 光纖透鏡耦合理論研究............................25
3.1 雷射二極體基模高斯光源........................26
3.2 光耦合效率....................................27
3.3 耦合損耗分析..................................29
4 基本元件之特性介紹..............................31
4.1 石蠟之特性簡介................................31
4.2 雷射二極體特性................................32
4.3 單模光纖結構與特性............................34
第三章 系統架構與原理...............................36
1 澆鑄平台架構....................................36
2 蝕刻平台架構....................................38
3 光纖透鏡熔燒系統................................40
4 耦合效率量測系統................................41
第四章 實驗架構與流程...............................47
1 大錐度圓對稱型光纖尖錐製作架構與流程............47
1.1 光纖尖錐蝕刻機制分析..........................52
1.2 光纖尖錐控制參數..............................55
2 大錐度比光纖尖錐製作架構........................58
2.1 以傾斜方式之光纖蝕刻流程......................60
2.1.1 以傾斜方式之理論分析........................62
2.2 以快速模具翻製微特徵之光纖尖錐蝕刻流程........64
2.2.1 快速模具翻製微特徵之模具製作................67
2.2.2 澆鑄矽膠模模具與蝕刻光纖....................70
3 光纖尖錐透鏡熔燒流程............................72
4 光纖透鏡光耦合效率量測流程......................73
第五章 實驗結果與討論...............................75
1 大錐度圓對稱型光纖尖錐製作結果與分析............75
2 大錐度比光纖尖錐製作結果與分析..................78
2.1 以傾斜方式之光纖蝕刻結果與分析................78
2.1.1 毛細現象測試................................79
2.2 以快速模具翻製微特徵之光纖尖錐蝕刻結果與分析..82
3 光纖尖錐透鏡熔燒................................85
4 光纖透鏡光耦合效率量測..........................90
第六章 結論與未來展望...............................96
1 結論............................................96
2 建議與未來研究方向..............................98
參考文獻...........................................101

                                

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