本研究分為三個部分，第一部分探討奈米碳片結構之氫氣感測器，並進行電性和物性的測量分析；第二部分探討奈米碳片/超奈米鑽石複合結構之氫氣感測器，並進行電性和物性的測量分析；第三部分探討氮化硼/奈米碳片複合結構之氫氣感測器，並進行電性和物性的測量分析。
本研究第一部分的重點是使用奈米碳片以及兩種後處理(熱退火處理、氫電漿處理)來對於奈米碳片進行處理之氫氣感測器，研究發現未退火前奈米碳片缺陷越大與石墨烯層結構越厚對於氫氣感測特性最佳，奈米碳片(20 min)在100 ppm的氫氣流量下，靈敏度為18.9 %；熱退火處理後的奈米碳片(20 min/500°C)，在100 ppm的氫氣流量下，靈敏度為30.96 %，主要為氧空缺缺陷變大，達到更多氧分子吸附，增強其氫氣感測特性；氫電漿處理後/奈米碳片(H2 700 W 1 min/CNWs 20 min)，在100 ppm的氫氣流量下，靈敏度為12.42 %。
第二部分中，利用奈米碳片與摻氮的超奈米鑽石進行複合結構，基於超奈米鑽石的結構，使得奈米碳片能有更大的比表面積，奈米碳片/超奈米鑽(CNWs 15 min/N-UNCD 7.5min)，在100 ppm的氫氣流量下，靈敏度為29.56%。
第三部分中，利用氮化硼/奈米碳片進行複合結構，主要研究氮化硼是否能對於氫氣產生響應值，但隨著氮化硼奈米片的增加，使得奈米碳片對於氫氣響應值不佳，因為奈米碳片的絕緣性，影響奈米碳片對於氫氣的感測，氮化硼/奈米碳片(BN 1 μL/CNWs 20 min)，在100 ppm的氫氣流量下，靈敏度為15.21%。

With growing demands of energy of fossil fuels, the world is in urgent need of a clean and renewable source of energy. Hydrogen (H2) energy is one of the good choices. However, it is unsafe and high potential for explosion risk, so the detection of hydrogen become an important task.
In this study, hydrogen sensors based on combination of Carbon Nanowalls (CNWs), Ultra-nanocrystalline diamond(N-UNCD) are investigated. First of all, it is focused on the effects of the quality and post-processing of Carbon Nanowalls, which was grown by physical vapor deposition (PVD) at different time duration. It was found that CNWs 20 min based H2 sensor, which exhibits response of 30.96% after 500 °C N2 annealed post treatment, compared to CNWs 20 min(18.9%) based hydrogen sensor at room temperature. Then ultra-nanocrystalline diamond was used as substrate to form the CNWs/N-UNCD hybrid nanostructure. It is noted that CNWs(15 min)/N-UNCD (7.5 min) samples show H2 gas response of 29.56%. This study shows promising performances for carbon-based hydrogen sensors.

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