氣壓平衡式之適應性模糊滑動控制實現7.5代平面顯示玻璃基板升降系統伺服定位控制

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研究生：	謝宏村 HONG-TSWUN HSIEN
論文名稱：	氣壓平衡式之適應性模糊滑動控制實現7.5代平面顯示玻璃基板升降系統伺服定位控制 The Servo Positioning Control for the Lifting System of the 7.5th Generation TFT-LCD Glass Substrate with Pneumatic Balance system using Adaptive Fuzzy Sliding Mode Control
指導教授：	江茂雄 Mao-Hsiung Chiang 郭中豐 Chung-Feng Kuo
口試委員:	鍾清枝 Tsing-Tshih Tsung
學位類別：	碩士 Master
系所名稱：	工程學院 - 自動化及控制研究所 Graduate Institute of Automation and Control
論文出版年：	2007
畢業學年度：	95
語文別：	中文
論文頁數：	105
中文關鍵詞：	AC感應伺服馬達、適應性模糊滑動模式控制、等效控制、軌跡控制、升降系統、平面顯示器、玻璃基板
外文關鍵詞：	AC induction servomotor, Adaptive Fuzzy Sliding control, equivalent control, trajectory control, lifting system, FPD, Glass substrate
相關次數：	點閱：340 下載：8
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本論文應用PC-base來控制氣壓平衡式之7.5代平面顯示器玻璃基板升降系統，比傳統的升降系統增加了氣壓平衡系統，不但可使用較小功率的AC伺服馬達，並且可以節省成本與耗能。其定位應用適應性模糊滑動控制理論，來達成我們所設定的軌跡伺服控制，使其運動過程能夠完全平順無振顫，如此一來可避免玻璃基板在升降的過程當中所造成的磨損，再加上主動式氣壓補償控制技術，使玻璃基板在輸送過程當中更有效率，更加節省耗能。在模擬方面，先推導出氣壓平衡式之7.5代平面顯示氣玻璃基板升降系統的數學模式，再利用matlab/simulink建模，模擬出整個系統架構，搭配實驗所擷取出來的資料相互比對，來達成我們所要的目標。
根據模擬與實驗結果中得知，從200mm到500mm的軌跡行程來說，其狀態都很穩定，上升速度平滑，但在700mm行程6秒到達時，由於機構在硬體上有最大速度的限制，飽和電壓為10V，當最高速度大於硬體最大速度時，就會達到飽和，以致於跟不上所規劃的軌跡，造成誤差變大。在模擬系統時跟實際實驗的結果有差不多的結果。
從整個實驗與模擬的終點誤差圖表中，很明顯的可以看出其誤差的差距並不大，表示經過適當的調整參數，也可以達到相同的良好控制效果。

關鍵字：AC感應伺服馬達、適應性模糊滑動模式控制、等效控制、軌跡控制、升降系統、平面顯示器、玻璃基板。

The paper aims to develop a novel lifting system with pneumatic balance for 7.5th generation of TFT-LCD Glass Substrate. The PC-base control system with adaptive fuzzy sliding mode control is used and can achieve the path control. The pneumatic balance system can counterbalance the weight of the loading so as to reduce the requested power of the AC servo motor.
The proposed system is verified by simulation and experiment. The stroke from 200mm to 500mm of the path control can be achieved with 6 sec. Due to the maximum power limit of the AC servo motor, the path profile is restricted. The simulation and experiment results show that the pneumatic-balanced lifting system controlled by adaptive fuzzy sliding mode control can achieve excellent performance.

Keywords: AC induction servomotor, Adaptive Fuzzy Sliding control, equivalent control, trajectory control, lifting system, FPD, Glass substrate.

摘要.............................................................II
Abstact.........................................................III
誌 謝............................................................IV
目錄..............................................................V
圖目錄...........................................................IX
表目錄..........................................................XVI
符號索引.......................................................XVII
第一章緒論....................................................19
1 前言.........................................................19
2 文獻回顧.....................................................20
2.1 伺服馬達文獻回顧...........................................20
2.2 控制理論文獻回顧...........................................20
3 研究動機.....................................................21
4 本文架構.....................................................22
第二章氣壓平衡式之7.5代平面顯示器玻璃基板升降系統之架構與建立.23
1 氣壓平衡式之7.5代玻璃基板升降系統之架構......................24
2 氣壓平衡升降系統.............................................28
2.1 氣壓平衡技術及原理.........................................28
2.2 氣壓平衡技術的優點.........................................30
3 實驗設備.....................................................31
3.1 無桿氣壓缸.................................................31
3.2 無桿電動缸.................................................32
3.3 AC伺服感應馬達.............................................32
3.4 磁簧開關...................................................33
3.5 升降平台位置計算...........................................34
3.6 PC-base控制系統............................................34
第三章動態系統模式建立及分析..................................35
1 交流感應伺服馬達.............................................35
1.1 交流感應伺服馬達的工作原理.................................35
1.2 閉路控制(closed-loop control)系統..........................36
2 7.5代玻璃基板升降系統數學模式建立............................38
3 matlab/simulink程式建模......................................40
4 模擬與實例比較...............................................42
第四章控制理論................................................43
1 模糊控制理論.................................................43
2 模糊滑動模態控制理論.........................................45
2.1 模糊滑動控制器.............................................46
2.2 等效控制...................................................47
2.3 歸屬函數建立.............................................. 47
3 適應性模糊滑動模式控制理論...................................50
4 適應性模糊滑動模式控制與穩定分析.............................53
5 控制器設計...................................................56
5.1 位置控制之數學模式.........................................56
5.2 位置控制器設計.............................................58
第五章伺服定位系統模擬與實驗結果..............................60
1 應用適應性模糊滑動模式控制之模擬伺服控制.....................61
1.1 AFSMC玻璃基板升降系統位置控制方塊圖........................61
1.2 AFSMC之200mm模擬伺服控制...................................61
1.3 AFSMC之300mm模擬伺服控制...................................65
1.4 AFSMC之500mm模擬伺服控制...................................69
1.5 AFSMC之700mm模擬伺服控制...................................73
2 應用適應性模糊滑動模式控制之軌跡伺服控制 實驗結果............77
2.1 AFSMC之200mm軌跡伺服控制實驗...............................77
2.2 AFSMC之300mm軌跡伺服控制實驗...............................81
2.3 AFSMC之500mm軌跡伺服控制實驗...............................84
2.4 AFSMC之700mm軌跡伺服控制實驗...............................87
3 適應性模糊滑動模式控制(AFSMC)之多點定位伺服控制實驗..........90
3.1 AFSMC之多點定位伺服控制實驗................................90
3.2 AFSMC之多點軌跡伺服控制....................................91
4 氣壓平衡系統.................................................93
4.1 主動式氣壓平衡控制系統.....................................93
4.2 氣壓平衡變動負載模擬.......................................94
5 實驗結果與討論...............................................97
第六章結論與未來展望..........................................99
1 結論.........................................................99
2 未來展望....................................................100
參考文獻........................................................101

                                

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