本研究目的為使用新型PC–based CNC ELC 2200控制器搭配以超音波馬達為致動器，開發具有精密定位功能之微奈米定位平台以整合於微型工具機，進行微銑切或鑽石刀具之鉋削。本研究使用台大實驗室所開發之共平面平台作為整個系統的基礎，利用新型CNC控制器（ELC 2200）以Dos介面去開發程式介面，並由Borland C 3.1程式軟體介面撰寫所需之命令，將命令傳送到驅動器以進行閉迴路定位誤差測試，搭配高精度雷射繞射式光學尺（LDGI）進行位移迴授；本研究採用PID控制演算法實現低速平穩的運動控制，並使用三種驅動方式（AC模式，Gate模式，DC模式）完成雙軸驅動。目前已完成雙軸閉迴路精密定位平台之定位控制，速度可達1 mm/s等速及定位誤差達100 nm以內。本研究並進行循圓測試，循圓半徑7 mm，其真圓度誤差為94 nm。定位平台應用於多晶鑽石刀具進行V溝之微加工，以定位間距100 μm進行微加工，量測微V溝之平均間距為100.363 μm。

The objective of this research is to develop an X-Y co-planar positioning stage with nanometer resolution using low-cost components and ultrasonic motors controlled by a PC–based CNC ELC 2200 controller. The development stage was integrated with a micro-milling machine that can perform the micro-milling or a diamond tool shaping. The PC–based CNC ELC 2200 controller was applied to develop the closed loop control program programmed with Borland C 3.1 language, to generate the control commands transmitted to the drivers of ultrasonic motors and to perform the positioning error tests. Two Laser Diffraction Grating Interferometer systems (LDGI) were integrated with the stage as displacement feedback sensors. A control program based on PID control was proposed and three control modes (AC mode, Gate mode and DC mode) have been tested. A circular positioning test with the radius of 7 mm using the developed stage was tested, and the overall roundness error was about 94 nm. The developed stage was applied to do the V-grooves cutting test of a polished aluminum alloy using the polycrystalline diamond tool. The average pitch error of the fabricated V-grooves was about 0.363 μm, based on the measured results.

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