本研究主要依據B軸旋轉時，因B軸對刀誤差所導致之刀具位置偏差，建立一加工路徑補償數學模式，實驗系統架構於具光學視覺系統之Precitech 705 FreeForm五軸加工機台上，實驗驗證包含 B軸對刀，B軸向補償加工技術驗證及利用建立之誤差補償數學模式，並依據分析之誤差量來進行形狀誤差最小化。實驗結果顯示 (A) 經20倍光學視覺系統B軸對刀之後，刀具偏心誤差量約7 微米；(B) 經B軸補償加工具30度斜率R8.7 mm球面之後，可獲得僅1微米刀具偏心誤差量與及降低約55 % 之形狀誤差；(C) 經調整誤差補償數學式之係數，可再降低約10 % 之形狀誤差，最後，本論文所開發B軸向補償加工技術應用於2 吋晶圓等級大小之模仁件加工上，成功地以X、Y、Z與B四軸刮削出僅P-V 值0.3 微米形狀誤差之具11度斜率非球面輪廓的4x4微陣列透鏡。研究結果將可應用於大尺寸晶圓級鏡片之模仁加工。

In this study, a B-axis machining error compensation model has been developed with considering the tool position error related to motion of the B-axis rotation and calculating the error compensation of the toolpath for the B-axis rotation. The experimental setup consists of a vision system using a N.A.= 0.41 objective lens of 20× magnification for tool alignment in a five-axis Precitech FreeForm 705 machine. Experimental tests have evaluated the performance of B-axis alignment, performance of the B-axis compensation for a cutting spherical lens with a 30° edge slope angle, and the minimization of form errors according to the analyzed machining errors. Experimental results show that there are tool position errors around 7 micron after B-axis alignment with the vision system. Moreover, the performance of the B-axis compensation when cutting a R8.7 mm spherical lens with a 30° edge slope angle can obtain 1 micron tool position errors of B-axis and reduce the form error by 55 %. Therefore, the form errors can be reduced by around 10 % by adjusting the parameters of the developed compensated model. Finally, a 4 × 4 aspherical lens array with 11° edge slope angle has been shaped on a 50 mm (~ 2’’) mold of wafer level optics (WLO) with X, Y, Z, and B axes. The proposed model has been implemented and verified. The peak-valley (P-V) form errors can achieve as 0.3 μm. Further research can focus on elaborating into larger diameter WLO mold insert machining.

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