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研究生: 黃智達
Jr-da Huang
論文名稱: 熱超音波覆晶接合技術用於發光二極體製程參數最佳化之研究
Optimization of Light Emitting Diode Processing Parameters Using Thermo-Ultrasonic Flip-Chip Bonding Technology
指導教授: 郭中豐
Chung-feng Jeffrey Kuo
口試委員: 黃昌群
Chang-chiun Huang
張嘉德
Chia-de Chang
蘇德利
Te-li Su
學位類別: 碩士
Master
系所名稱: 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 109
中文關鍵詞: Levenberg-Marquardt 演算法倒傳遞類神經網路灰關聯分析主成份分析法覆晶接合田口直交表發光二極體
外文關鍵詞: Levenberg-Marquardt Algorithm, Back-Propagation Neural Network, Grey Relational Theory, Principal Component Analysis, Taguchi Orthogonal Array Table, Flip-chip Bonding, Light Emitting Diode
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  • 發光二極體(Light Emitting Diode;LED),為21世紀的新型光源,具高效率、壽命長以及不易破損等優點。在要求高品質與高效率的時代中,晶片封裝製程技術為影響LED 的品質與效能之關鍵。
    覆晶接合(Flip-Chip Bonding)具備輕、薄、短、小封裝優勢,為封裝製程技術發展之焦點。熱超音波覆晶接合(Thermo-Ultrasonic Flip Chip Bonding)製程,直接將晶片上的金墊(Gold Pad)與基板上的金凸塊(Gold Bump)接合在一起,金/金介面具有較佳的接合強度、電性及可靠度,且製程簡單、無鉛污染問題,並可在較低溫度及壓力下進行接合,具備高精度及細間距(Fine Pitch)的發展潛力。
    本論文在研究LED 熱超音波覆晶接合製程,研究其多重品質特性之製程參數最佳化。因各品質特性間的相關性大及品質特性數目多,要決定最佳因子水準組合有其困難性,因為在取捨各因子水準時,可能會造成各品質特性之間相互衝突的問題。
    本研究使用田口直交表(Taguchi Orthogonal Array Table)規劃實驗,實驗完成後,以主成份分析法(Principal Component Analysis)去除品質特性間的關聯性,再以灰關聯分析(Grey Relational Theory)找出最佳因子水準組合。最後結合倒傳遞類神經網路(Back-Propagation Neural Network)與Levenberg-Marquardt 演算法建構LED 覆晶接合製程之預測系統,將控制因子設為網路之輸入參數,而品質特性設為輸出參數,經過網路學習訓練,本系統預測誤差率在5% 以內,證明本預測系統有極佳的預測能力。


    The light emitting diode (LED), a new light source in the twenty-first century, contains many advantages, such as high efficiency, long lifespan, and bold structure. The technology for chip packing is the focal point to increase LED quality and performance.
    Flip-chip bonding, a kind of chip packing technology, allows produced chip to be lighter and smaller. Thermo-ultrasonic flip chip bonding is a way that directly joins gold pad and gold bump. The gold-gold connecting interface has better strength and electric reliability along with simple production process with no lead pollution. This kind of packaging also can be done in low pressure and low temperature with high accuracy and fine pitch.
    This study focuses on LED thermo-ultrasonic flip chip bonding process to find the multi-quality properties with the optimization of LED processing parameters. The process will be more complex as qualities have strong correlation to each other. With many different quality characteristics, we will have to determine the combination of processing factors to yield best performance.
    We first used the Taguchi orthogonal array table and then the principal component analysis to remove the relativity of each quality characteristics. We then used grey relational theory to obtain the best LED processing parameter and then used the back-propagation neural network and Levenberg-Marquardt algorithm to establish the LED Flip-Chip Bonding processing-quality predicting system. The error of the result is within 5%, indicating a high forecast capability.

    第1章 緒論 1 1.1 前言 1 1.2 研究動機與目的 2 1.3 文獻回顧 3 1.4 研究步驟 6 1.5 研究大綱 8 第2章 發光二極體覆晶接合製程介紹 9 2.1 LED簡介 9 2.1.1 LED 發光原理及組成 9 2.1.2 高亮度藍光 LED 11 2.2 覆晶接合技術簡介 12 2.2.1 覆晶接合技術 13 2.3 金對金覆晶接合技術之介紹 15 2.3.1 超音波 15 2.3.2 熱超音波覆晶接合原理 15 2.3.3 超音波振動方向 17 2.3.4 金對金熱超音波覆晶接合製程 19 2.3.5 金對金熱超音波覆晶接合之優點 21 2.4 影響熱超音波覆晶接合品質之主要因素 22 2.4.1 接合溫度 22 2.4.2 接合下壓力 22 2.4.3 超音波震盪時間 22 2.4.4 超音波震盪功率 22 2.4.5 接合頭接合之延遲上升時間 23 2.4.6 晶片與基板間之共平面性 23 2.5 金對金接點之破壞分析 24 第3章 田口式品質工程 27 3.1 田口式品質工程概述 27 3.2 直交表簡介 28 3.2.1 直交表的使用 29 3.2.2 直交表的選擇 30 3.3 品質特性種類 33 第4章 主成份分析法與灰關聯分析法 34 4.1 主成份分析法 34 4.1.1 主成份分析之內涵 34 4.1.2 計算之理論基礎 35 4.2 灰色系統理論之灰關聯分析 40 4.2.1 灰關聯分析概念 40 4.2.2 灰色系統 40 4.2.3 灰關聯分析和統計迴歸比較 41 4.2.4 序列之可比性之建立 42 4.2.5 灰關聯度分析 42 第5章 主成份分析法結合灰關聯分析法 44 5.1 分析步驟之規劃 45 第6章 類神經倒傳遞網路結合LM演算法 50 6.1 類神經網路簡介 50 6.2 倒傳遞網路演算法 51 6.3 倒傳遞網路的架構 52 6.4 快速訓練倒傳遞類神經網路的演算法 53 6.5 Levenberg-Marquardt 演算法簡介 54 6.5.1 牛頓法 54 6.5.2 高斯牛頓法 54 6.5.3 Levenberg-Marquardt 演算法 56 6.6 執行倒傳遞類神經網路相關之設定 57 第7章 實驗結果與討論 59 7.1 實驗設備 59 7.1.1 熱超音波覆晶接合機 59 7.1.2 推力試驗 64 7.1.3 LED點測機 67 7.1.4 光學顯微鏡 70 7.2 實驗材料 72 7.3 實驗流程 74 7.4 應用倒傳遞網路結合LM演算法 92 7.4.1 數據正規化 92 7.4.2 倒傳遞網路結合LM演算法之設定與架構 95 7.4.3 檢驗其預測效果 99 7.4.4 與傳統倒傳遞網路比較學習速度 101 第8章 結論 102 8.1 實驗計劃法 102 8.2 熱超音波LED覆晶接合之多重品質 102 8.3 倒傳遞結合LM演算法之預測系統 103 8.4 未來研究之建議 104

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