光柵刻痕(grating)是精密量測工具\ -\ 光學尺(optical encoder)的關鍵零件，由一透明或反射的材料上，定間距刻上極細微之固定刻痕，但光柵的刻痕因為搭配使用光源之波長，為微米等級線寬，使其製作非常困難，尤其不易製造出超過50公分總長的連續柵欄形式，其價格也隨長度增加而上揚，屬於附加價值產品。本研發探討使用兩種製造方法克服長光學尺的製造技術，其一是搭配卷對卷自動化生產機台(Roll-to-Roll processer)及光學尺模具，利用高解析度之光學顯微鏡，再次微米精度下，確認模具與已成形光柵之相對位置，再利用壓電致動器(piezoelectric actuator)驅動模具橫移(translation)及轉動(rotation)，透過這些一系列精準對位，達成連續壓印的光柵刻痕製造；另一種則是由雷射雕刻機進行一整排光柵的加工，搭配高解析度之光學顯微鏡及自製機構模組，在每一次加工中重新定位連續製造出接續的光柵刻痕。此創新機構及操作系統，成功克服當前光柵刻痕長度製作限制，將來若能夠整合成自動化系統，同時也能夠提升製作效率，相信可以取代成本昂貴的半導體製程方法。

material which processed gratings of the same pitch and periodic,
but the fabrication of optical encoder is much difficult becuse of its micron grade line width, especially for over 50 centermeter lenth, the longer the optical encoder, the higher the price, it's a kind of high value-added product.In this reserch, we try to use two different method producing longer optical endcoder, one is using Roll-to-Roll processer and the grating mold, with high resalution optical microscope, using piezoelectric actuator drive translation and rotation of the mold after making sure the relative position between mold and grating-completed in sub-micro accuracy, it can accomplish continuing imprint the fabrcation of gratings by a seris of precision positioning,the other is using laser ablation device,
to fabrication countinuing gratings, it will repositioning in every processing with high reslution optical microscope and self-produced mechanism. We can successfully overcome the limitation of grating of working space in this brand new system, if it can develop into automation and upgrade the efficient, the brand new method can replace the traditional semi-conductor process in the future.

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