在本論文中，我們將設計與製作光纖通訊中之分波多工器，它是在矽基板上作出一個光纖耦合的輸入端，平面波導凹面式光柵及五個光纖耦合的輸出端。我們使用Photon Design的商業軟體，包含模擬Echelle光柵的EPIPPROP，與分佈式布拉格反射(Distributed Bragg Reflector, DBR)光柵設計的FIMMPROP，以這兩套軟體互相搭配使用，做為整個分波多工器的模擬設計。為了讓Echelle光柵與表面電漿干涉儀結合能有光譜儀的功能，本實驗室所設計元件為1x5的密分波多工器(Dense Wavelength Division Multiplexer, DWDM)，通道間隔為0.8 nm，所有光波導線寬皆為0.45 μm，凹面階梯式光柵會有金屬沉積於反射面的設計，DBR光柵也經由計算發現Duty Cycle為0.5、週期0.3 μm、光柵週期數為6的情況下，能有最佳的反射頻譜。
表面電漿共振分別有三種耦合方式：光柵耦合、波導耦合和稜鏡耦合。本論文所採取的方式為矽波導耦合來產生表面電漿之生物醫學感測器。主要是利用波導的上面與側邊都覆蓋一層金屬，當光經過有金屬覆蓋的波導時，將會在矽與金屬交接面產生一表面電漿波，金屬與待測物產生另一表面電漿波，當這兩表面電漿波傳到金屬尾端後重疊在一起，這時就會有干涉現象的發生，這種機制相當於馬赫詹德干涉儀(Mach-Zehnder Interferometer)。
生醫感測元件除了表面電漿波導，由元件長度引起的相位變化量也是生物干涉感測的一種應用。因此我們設計微環形共振腔(Microring Resonator, MRR)，不同品質因子(Quality Factor, Q-factor)在不同濃度的檢測溶液下，搭配低同調光纖光學干涉技術(Optical Fiber Low Coherence Interferometry, OFLCI)，來量測干涉波包的位移變化量。
本實驗室大部分的元件都是在國家奈米元件實驗室(National Nano Device Laboratories, NDL)製做，包含Echelle光柵和表面電漿干涉儀(Surface Plasmon Interferometer, SPI)。除此之外也有些元件是為了在NDL無法完成的製程條件，例如 Echelle光柵搭配DBR光柵元件，因為光柵的週期為0.3 μm，已經超過NDL的曝光機製程的極限0.35 μm，因此送到IMEC(Interuniversity MicroElectronic Center)代工。本實驗室自行操作的製程步驟從包含光罩設計、黃光微影、乾式蝕刻、金屬的物理氣相沉積和氧化保護層的化學氣相沉積等製程步驟。最後會利用拍攝掃描式電子顯微鏡(Scanning Electron Microscopy, SEM)來檢視波導的側壁粗糙度和聚合物是否殘留等等。

In this thesis, the wavelength demultiplexer is designed and fabricated on the silicon wafer for the fiber optical communications, which includes input/output coupling and concave diffraction grating. The EPIPPROP and FIMMPROP from the commercial software of Photon Design are dedicated to the simulation of Echelle grating and distributed Bragg reflector (DBR) grating, respectively. In order to integrate Echelle grating into the surface plasmon interferometer for spectrometer applications, a 0.8-nm channel spacing is implemented and demonstrated in the simulation. The siliconwire waveguide width is 0.45 μm and concave grating is coated with the aluminum metal for better reflection. The experimental data on Echelle grating will be based on the DBR grating with 0.5-duty cycle, 0.3-µm period, and 6 period number.
There are three coupling approaches in surface plasmons: grating coupler, optical waveguide coupler and prism coupler. In this thesis, a siliconwire based biological sensors through surface plasma polaritons will be demonstrated. The main structure is to implement the surrounding metals on top and sidewall of the silicon-wire for biosensing. When the optical mode passes through the sensor area, the surface plasma waves are induced in the surfaces between metal and dielectric films and form the interference phenomena. At the end of sensing region, three surface plasmon polaritons will combine together and illustrate interferograms.
In addition to the surface plasmon interference in siliconwire, a device length caused phase variation could be utilized for interference biosensing. Therefore, we design a microring resonator under different quality factor and concentrations to be characterized by the optical fiber low coherence interferometery through interferogram shift.
The process in the National Nano Device Laboratories (NDL) will include Echelle grating and surface plasmon interferometer, which includes the photolithography, etch, physical vapor deposition, plasma-enhanced chemical vapor deposition, and scanning electron microscopy. Due to NDL fabrication limitation, the DBR grating with the 0.3-μm period from Echelle spectrometer grating was sent out and processed in IMEC (Interuniversity MicroElectronics Center).

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