本論文主要係自我對準指叉狀背面電極太陽能電池的製程應用與各個製程條件與相關結果之探討。相較於傳統的正反太陽能電池，指叉狀背面電極太陽能電池有許多如無正面遮蔽效應、減少串聯電阻等許多優點。本實驗在IBC太陽能電池的製程的部分一共分為六個主要的步驟，分別是N+擴散製程、電性絕緣區域、P+擴散製程、金屬電極製程、基底薄化之蝕刻製程、以及效率量測等六大主要步驟。
本實驗亦針對各項參數條件對於製程進行的影響。實驗結果顯示，當熱擴散時間固定為30分鐘時在900°C時可得到19 Ω/sq之片電阻；而在電性絕緣的部分使用30%KOH蝕刻5分鐘後可得到厚度大約7.7μm及最佳之表面平坦度。而在基底薄化的部分，當厚度從280μm薄化至140μm時效率則有明顯的提升，目前本實驗之IBC太陽能電池可達到5.5%之效率，未來將可再隨著各製程步驟之最佳化進而提升效率。

Due to both polarities of the metal electrodes on the rear side of the device, IBC solar cell exhibits some advantages over the conventional solar cell with metal contacts on both sides, such as increased short circuit current and improved series resistance. In the thesis self–aligned diffusion processes for intedigitated back- contact solar cell were studied. The fabrication of IBC solar cell includes six main steps: formation of N+ diffusion layer, electrical isolation, formation P+ contact layer, metallization, substrate thinning, and device characterization.
We obtain a sheet resistance of 19Ω/sq by lifting the temperature at 900°C for 30min for emitter formation. Electrical isolation is done by realizing deep trenches between metal fingers with 30% KOH etching process. The etching depth is about 7.7μm with smooth surface. By thinning down the substrate from 280μm to 140 μm, the short circuit current of the solar cell increase due to finite carrier lifetime of the substrate.
As-realized IBC solar cell has a short circuit current density of 22.75 mA/cm2, a open-circuit voltage of 554mV, a filling factor of 44.02%, and a ultimate efficiency of 5.5%.

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