本研究主要目的是利用非接觸式環型三角雷射探頭整合於可由個人電腦控制之三軸微定位平台上，以開發出一套精密非接觸式介觀尺寸量測系統，量測系統元件主要包括：環形三角雷射探頭系統、三軸微定位平台及其控制器、旋轉編碼器、功能介面卡及PC等。
系統建構方面，首先完成雷射探頭固定裝置、測試載具夾治具及旋轉編碼器夾治具等之設計與製造，量測所需的探頭控制指令及平台量測路徑，則可分別經RS232串列通訊埠由PC傳送至雷射探頭控制器以驅動雷射探頭讀值及平台控制器以達到沿X軸作平面往返式路徑掃描來達到自動化量測，其軟體控制方面是以Visual Basic 6.0程式語言發展量測介面以方便操作量測系統，主要包括三軸微定位平台之手動控制單元、平台之原點復歸單元、量測路徑規劃單元、雷射探頭命令控制單元、計數卡設定單元及檔案存檔單元等模組。
在量測點資料誤差比對方面，將以三次元座標量測儀(C.M.M.)之量測資料作為比對基準，以探討非接觸式探頭量測測試載具之量測誤差，實驗結果得知2D規則幾何形狀、階高及標準霧化鋼球之量測誤差分別約為0.016 mm、0.024 mm及0.033 mm。本系統也實際應用在微小、薄零件之量測上，如手錶內之小齒輪及支撐架和硬幣上。

The objective of this study is to develop a non-contact precision meso-scale measurement system, in which a circular triangulation laser probe system was integrated with a PC-based 3-axis precision stage, to digitize the 3D profile of a tiny and thin workpiece. The measuring system consists of a personal computer, a 3-axis precision stage system and a circular triangulation laser probe system. Three fixtures were first designed and fabricated, the first one was used to mount the laser probe head on the Z-axis stage, the second one was used to clamp the workpiece on the platform, and the last one was used to connect X-axis stepping motor and the rotary encoder. The information in the whole measuring system, comprising a personal computer, a 3-axis precision stage controller, a rotary encoder, a counter interface card, and a controller of the circular triangulation laser probe, was integrated technically. A set of measuring software programmed with Visual Basic 6.0 language was developed to configure the scanning path, to process the control commands of the laser probe, and to process the digitized data points.
The measurement errors of the development system were analyzed by digitizing three designed test specimens, which were verified by a CNC coordinate measurement machine (C.M.M.). Based on the analysis results, the measurement error of the stepped specimen was about 0.024 mm, and that of the 2D geometry specimen was about 0.016 mm, and that of the calibrated ball was about 0.033 mm. Finally, the developed system was applied successfully to the measurement of some tiny and thin workpieces, such as a small gear and a support framework of a watch and a coin.

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