本研究探討壓電材料於有限空間的腔體中振動並與液體相互耦合之振動特性的影響，並應用於壓電式幫浦以逆壓電效應作動進而推動液體產生流量，透過實驗量測及數值計算的研究方法得知壓電材料於不同流體的共振頻率及振動模態。研究主要探討壓電材料與空氣與水等不同流體耦合作動之下影響的振動特性，並設計兩種不同的壓電幫浦進行比較，其一設計是利用串聯型壓電雙層圓盤結合PDMS高分子薄膜於共振頻率產生位移改變腔體體積，使液體因腔體體積的改變增加流體的流量；另一則是利用並聯型壓電雙層圓盤直接與水接觸壓電微幫浦。故壓電圓盤結合於PDMS薄膜與壓電圓盤直接對水接觸的固液耦合振動特性於本文進行討論。本研究之壓電材料與液體耦合特性使用三種量測設備進行實驗量測，包括垂直式的全域式電子斑點干涉術（Electronic Speckle Pattern Interferometry, ESPI）對壓電材料於流體中的振動進行即時量測，紀錄壓電材料與不同流體耦合作用下的共振頻率與振動模態，雷射都卜勒振動儀(Laser Doppler Vibrometer, LDV)以單點量測壓電材料與流體耦合的面外振動位移，並可使用穩態掃頻的方式獲得壓電幫浦於固液耦合的面外共振頻率，阻抗分析儀則針對壓電材料的電性進行量測，主要獲得面內振動的共振頻率與反共振頻率，使用聚偏二氟乙烯(PVDF)薄膜感測器去實際量測上下兩個結構中的壓電圓盤相位，本研究可對具有三維耦合振動特性的壓電雙層圓盤進行量測，以獲得該元件與流體相互耦合作用下的共振頻率。所有的實驗量測結果皆與固液耦合的有限元素數值計算進行分析比較，無論在共振頻率或振動模態皆可相互對應，對於壓電材料的動態特性於實驗與數值分析皆有良好的驗證結果，成功獲得壓電元件於流體上與流體內的振動特性，準確獲得其共振頻率與振動模態。本研究並將得到的振動特性結果應用於壓電雙層圓盤結合PDMS薄膜式壓電幫浦中，在空氣與水作用分析的共振頻率探討振動模態對於壓電為幫浦流量的影響進行探討，對於PDMS薄膜式壓電幫浦的設計與壓電材料於空氣與水中的固液耦合下的共振頻率及振動模態分析提供完整且豐富的資訊。

The vibration characteristics of piezoceramic bimorph disks are studied on the solid-liquid coupled effect for the micro-pump devices. Resonant frequencies and mode shapes of piezoelectric elements, which promote flow in different fluids including air and water, are obtained by experimental measurements and finite element numerical calculations. Two different piezoelectric pumps are designed for verifying the solid-liquid coupled vibrations of piezoelectric bimorphs both on the fluid surface and under fluids. One of piezoelectric pump uses a piezoelectric disks bonding on the PDMS polymer, and the vibration in resonance produces the changes of chamber volume for increasing fluid flow. Another is the contact-directly design, which piezoelectric disks contact water directly in the pump chamber. Piezoelectric bimorph disks are investigated by using four experimental techniques obtaining the solid-liquid coupled vibration characteristics. First, the self-arranged vertically electric speckle pattern interferometry (ESPI) is used to measure simultaneously the resonant frequencies and mode shapes for the vibrations of piezoelectric bimorphs in the fluid. Second, the laser Doppler vibrometer (LDV) can obtain frequency spectrum of vibrating displacement by dynamic signal swept-sine analysis. Third, the correspondent resonant frequencies and anti-resonant frequencies in fluids are obtained by impedance analysis for the piezoelectric bimorph disk. Last, use PVDF senor to check the phase between upper piezoelectric disk and lower piezoelectric disk. Moreover, the quadratic, three-dimensional piezoelectric-solid element and acoustic coupling element, respectively, are used to setup the piezoelectric device and different fluids in finite element method (FEM). All the experimental results are compared with the solid-liquid coupled vibration characteristics in FEM calculation. Finally, the piezoelectric pump with PDMS layer operates on the resonant frequencies to measure the flow rate in water. It has good consistence in resonant frequencies and mode shapes by experimental measurements and finite element numerical calculations

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