本文旨在研製一部應用於驅動大氣電漿之高壓短脈衝電漿產生器。所提之系統包括:功率因數修正器、高壓短脈衝電路、數位控制器、人機介面、通訊模組與電漿管。首先，本系統主電路為兩級式架構，第一級電路採用主動式功因修正電路，以提升系統之功因值，第二級為所提之改良型馬克斯短脈衝電路，主要是以傳統的馬克斯電路輸出高壓負脈衝，並利用變壓器漏感與二極體接面電容諧振，以輸出所需之高壓短脈衝；其次，系統控制方面使用數位控制器結合無線通訊模組以及人機介面，以達到遠端監控及高壓隔離的目的；再者，根據理論推導之系統參數進行電腦模擬，以驗證所設計系統之可行性；最後，再將兩級式主電路、數位控制器、人機介面與通訊模組進行整合，並實際驅動大氣電漿負載及進行玻璃表面處理實驗，以驗證所提系統之正確性及有效性。

This thesis aims to develop a high-voltage short-pulse plasma generator for driving atmospheric plasma. The proposed system includes: power factor corrector, high-voltage short-pulse circuit, digital controller, human-machine interface, communication module and plasma tube. First, the main circuit of this system is a two-stage structure. The first stage is an active power factor correction circuit to improve the power factor of the system. The second stage is a proposed modified Marx-short-pulse-circuit. The traditional Marx circuit is used to provide negative high-voltage pulse, and the leakage inductance of the transformer is used to resonate with the junction capacitance of the output diode to generate the required high-voltage short-pulse. Moreover, the digital controller integrates a wireless communication module and a human-machine interface to achieve remote monitoring and high-voltage isolation. Futuremore, computer simulations are conducted based on the theoretically derived system parameters to verify the feasibility of the designed system. Finally, the two-stage main circuit, digital controller, human-machine interface and communication module are integrated to drive atmospheric plasma, and applied to glass surface treatment experiments to verify the effectiveness of the proposed system.

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