微/奈米轉印技術是目前各界廣泛應用的新興技術，具有大量生產、低成本以及微奈米尺度解析度等優點。然而現階段此技術仍有模仁製作耗時且昂貴，以及難以被高效率使用的問題存在。近年來塊狀金屬玻璃（BMG）被證實具有高強度、高韌性以及在過冷液相區具有超塑性成形的性質，因此塊狀金屬玻璃被認為是用來製作微/奈米轉印模具的優秀材料。
在本研究中將數值模擬應用於(Zr48Cu36Al8Ag8)99.25Si0.75金屬玻璃熱壓轉印製程，並研究轉印時模穴的填充過程與金屬玻璃作為微/奈米轉印模具的可行性。本研究利用Computational fluid dynamics (CFD)商用模擬軟體，基於有限體積法(Finite volume method, FVM)的理論模擬材料於模穴中的填充行為，並利用熱壓數值模擬之填充結果，分析各種熱壓參數下其結構的整體填充情形。透過平均中心填充率與平均填充情形的研究，發現平均中心填充率與平均填充情形具有相同的趨勢，並且透過兩者變異量的研究，探討在不同操作參數下其結構填充後的均勻性。
另外，本論文針對所開發的塊狀金屬玻璃模具真空熱壓轉印設備進行研究，並針對設備之各項性能以及於熱壓微/奈米結構轉印製程的可行性進行探討。結果指出開發之真空熱壓轉印設備為一穩定、高精度之平台，並適合應用於金屬玻璃的微奈米熱壓轉印製程。

Micro/nano imprint technology is now widely used for future application and mass production because the technology has several advantages, such as nano scale resolution, low cost and high throughput. However, there are some limitations of current micro/nano imprinting. Especially the mold used in the process is very expensive and difficult to be used efficiently. In recent years, bulk metallic glasses (BMG) are proved to have high strength, high toughness and with superplastic forming properties in the supercooled liquid region. Therefore, bulk metallic glasses are considered to be excellent materials for fabricating micro / nano imprint molds.
In this study, numerical simulations were applied to the hot embossing process of (Zr48Cu36Al8Ag8)99.25Si0.75 bulk metallic glasses to study the cavity filling characteristics in the process and the feasibility of applying bulk metallic glasses for micro/ nano imprint molds. In this study, computational fluid dynamics (CFD) commercial simulation software, based on the finite volume method (FVM) was used for simulating the filling behavior, and we used the results of numerical simulation to analyze the effect of process parameters on the filling conditions. Through the simulated results, it is found that the average central filling rate and average cavity filling condition are with the same trend. The uniformity of filled cavities in different operating parameters was also discussed by analyzing the central filling rate variations and the average cavity filling condition variations in this study.
In addition, this thesis presents the development of a special vacuum hot embossing machine for fabricating bulk metallic glass molds and a study of its performances. The results show the developed machine can be a stable and high precision platform for performing metallic glass micro/nano imprinting process.

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