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研究生: 黃健瑋
Jian-wei Huang
論文名稱: 以溶膠凝膠法製備摻釹氧化鋅之特性分析
Study of Neodymium Doped ZnO by Sol-Gel Method
指導教授: 趙良君
Liang-chiun Chao
口試委員: 黃鶯聲
none
李奎毅
none
唐志雄
none
學位類別: 碩士
Master
系所名稱: 電資學院 - 電子工程系
Department of Electronic and Computer Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 80
中文關鍵詞: 氧化鋅溶膠凝膠
外文關鍵詞: ZnO, sol-gel
相關次數: 點閱:224下載:0
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  • 本研究是探討以溶膠凝膠法製備稀土元素釹摻雜氧化鋅。將Nd:ZnO試片先經熱退火處理,並由場發射掃描式電子顯微(FE-SEM)、X光繞射譜線(XRD)、拉曼散射光譜(Raman)和光激發螢光光譜(PL)分析。以光源為He-Cd雷射(325nm)的光激發螢光光譜量測,發現Nd:ZnO除了因氧化鋅本身能隙發光於3.29eV (377nm)與缺陷發光外,在沒有摻雜其他共活化物的條件下,成功激發出900 nm紅外光螢光訊號。此紅外光是因為電子由Nd3+的能階4F3/2 →4I9/2躍遷所致。此紅外光發光訊號在氧氣氛下退火400℃,會有較佳的訊號強度。Nd:ZnO在熱退火處理時,紅外光發光強度也會隨退火溫度升高而有變化。而從XRD中發現,在高溫退火後會有Nd2O3的形成,對紅外光發光也有一定的影響。


    We report the growth and characterization of neodymium doped ZnO prepared by sol-gel method. As-grown and annealed sample were analyzed by field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), Raman Scattering Spectroscopy (Raman), and Photoluminescence (PL). PL study of Nd:ZnO by using a He-Cd laser at 325 nm shows bandgap emission at 377 nm and defect related luminescence. Nd:ZnO also shows luminescence of Nd3+ near 890 nm by using He-Cd laser. The infrared emission is due to the electrons transition from 4F3/2 to 4I9/2 of Nd3+. Nd:ZnO annealed at 400℃ shows stronger luminescence of Nd3+. The infrared emission of Nd3+ changed its intensity with variation of annealing temperature. XRD shows Nd2O3 appears when Nd:ZnO annealed at high temperature and it will influence luminescence of Nd3+.

    中文摘要 ------------------------------------------------------------------------------------- Ⅰ 英文摘要 ------------------------------------------------------------------------------------- Ⅱ 致 謝 ------------------------------------------------------------------------------------- Ⅲ 目 錄 --------------------------------------------------------------------------------------Ⅳ 圖表索引 --------------------------------------------------------------------------------------Ⅵ 第一章 序論 -------------------------------------------------------------------------------- 1 1-1 前言與研究動機 ------------------------------------------------------------- 1 1-2 氧化鋅的簡介 ---------------------------------------------------------------- 2 1-3 氧化鋅的發光機制 ---------------------------------------------------------- 3 第二章 原理 -------------------------------------------------------------------------------- 8 2-1 溶膠凝膠法(Sol-Gel Method)基本原理 ---------------------------------- 8 2-2 稀土元素簡介 ----------------------------------------------------------------12 2-3 氧化鋅摻雜稀土元素 -------------------------------------------------------13 第三章 實驗方法與流程 -----------------------------------------------------------------15 3-1 實驗藥品、設備與流程 ----------------------------------------------------15 3-2 特性分析儀器------------------------------------------------------------------22 3-2.1 X-ray繞射儀---------------------------------------------------------------- 22 3-2.2 場發設掃描式電子顯微鏡(FESEM)與EDS---------------------------23 3-2.3 拉曼散射光譜 (Raman) ------------- -------------------------------------23 3-2.4 光激發螢光光譜(Photoluminescence) ---------------------------------- 24 第四章 數據分析與討論-------------------------------------------------------------------25 4-1 製程一---------------------------------------------------------------------------25 4-1.1 FE-SEM與EDS結果分析------------------------------------------------ 25 4-1.2 X光繞射光譜分析(XRD)--------------------------------------------- 29 4-1.3 拉曼光譜分析(Raman Spectroscopy)-------------------------------- 30 4-1.4 光激發螢光光譜(PL) ------------------------------------------------------31 4-2 製程二:摻釹氧化鋅(Zn/Nd=5)--------------------------------------------36 4-2.1 FE-SEM與EDS結果分析 -----------------------------------------------36 4-2.2 X光繞射光譜分析(XRD)----------------------------------------------40 4-2.3 光激發螢光光譜分析(PL) -------------------------------------------------46 4-3 製程二:摻釹氧化鋅不同濃度及氣體下退火比較---------------------53 4-3.1 改變摻雜濃度之PL與XRD ---------------------------------------------53 4-3.2 改變退火氣氛之PL與XRD ---------------------------------------------60 4-4 以532nm雷射激發之PL討論--------------------------------------------- 70 第五章 結論 ---------------------------------------------------------------------------------74 參考文獻 ------------------------------------------------------------------------------------- 76

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