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研究生: 賴萱
Hsuan Lai
論文名稱: 藉由不同折射率矽線波導陣列之光束轉向
Beam Steering through Index-Mismatched Silicon Wires-based Emitters
指導教授: 徐世祥
Shih-Hsiang Hsu
趙良君
Liang -Chiun Chao
口試委員: 何文章
Wen-Jeng Ho
葉秉慧
Ping-Hui Yeh
莊敏宏
Miin-Horng Juang
徐世祥
Shih-Hsiang Hsu
學位類別: 碩士
Master
系所名稱: 電資學院 - 電子工程系
Department of Electronic and Computer Engineering
論文出版年: 2022
畢業學年度: 110
語文別: 中文
論文頁數: 101
中文關鍵詞: 矽光子光學相位陣列波束轉向
外文關鍵詞: Silicon Photonics, Optical Phased Array, Beam Steering
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在光學感測或掃描元件的開發上,經常會針對光學相位進行探討,有效的相位變化將會使得感測的靈敏度提高與掃描的範圍更廣,對於生醫領域或是光學探測、測距技術上都將會有極大的幫助。生醫感測上,以微環形共振器(Micro Ring Resonator, MRR)之相位的研究相當廣泛,此將會影響待測目標之辨識度,除了將單一環形結構優化,串接環形或改善偏振方式皆為影響靈敏度的關鍵因子。有別於傳統的環形共振器探討共振波長變化,本論文將會藉由觀察ring-down現象來取代龐大且精密的光學頻譜分析儀之需求,探討不同折射率波包干涉之間的相對位移,提出基於矽開發之MRR生物感測,在固定光波導損耗下,空間中高階環降現象將提高靈敏度,以半徑100 μm結構來說,在0.1 μW最小光功率下,靈敏度為642000 nm/RIU,而更高的靈敏度也能在更窄的頻寬以及更小的波導傳播損耗中實現。
於光探測或測距技術(Light Detection and Ranging, LiDAR)中,使用光學相位陣列(Optical Phase Array, OPA)可突顯並實現積體化與快速掃描的優勢,間距縮小將可達較大可視場角(Field Of View, FOV),然而這也導致串擾現象(Crosstalk)發生,因此本論文也將深入的討論FOV與間距(pitch)、通道數等之間的關係,並研究增加矽帶波導來降低波導間的交互耦合,以及如何使用基因法優化來減少Crosstalk。研究中開發了不同pitch之16通道的OPA,同時使用矽帶波導來降低天線之間的串擾,量測後發現矽帶的增添將會微幅提升OPA的可視場角,Side lobe可降低3~4 dB,而主要在基因演算法優化下,透過加入SMSR搭配適應度比對,測量上能夠使pitch較大的元件也擁有穩定的可視場角,pitch較小之元件則能減少side lobe出現。本研究測量出大於60度的水平可視場角,且垂直掃描調變角度達約每奈米0.1025度,水平FWHM達2.16~3.04度,SMSR可達約13~18 dB。


The optical phase is often investigated in developing optical sensing or scanning elements. Effective phase changes will lead to more sensitive sensing and a more comprehensive scanning range, which will significantly help in the biomedical field or optical detection and ranging technology. The Micro Ring Resonator (MRR) phase in biomedical sensing is widely studied, affecting the target's recognition to be measured. In addition to optimizing the single ring structure, connecting rings in series or improving the polarization method is crucial to sensitivity enhancement. Unlike the conventional ring resonators to investigate the resonant wavelength variation, this thesis will replace the need for a large and precise optical spectrum analyzer by observing the ring-down phenomenon to investigate the relative displacement between the interferograms with different refractive indices. The proposed MRR biosensing based on silicon developments will increase the sensitivity at a fixed optical waveguide loss with a high-order ring-down in spatial interference. The sensitivity for a 100 μm radius structure is 642,000 nm/RIU at a minimum optical power of 0.1 μW.

In the Light Detection and Ranging (LiDAR) technology, Optical Phase Array (OPA) can highlight and realize the advantages of integration and fast scanning. The reduced array spacing will achieve a larger Field of View (FoV), but this also leads to the occurrence of Crosstalk. Therefore, this thesis will also discuss the relationship between FOV, pitch, channel number, etc. The investigation is to reduce the cross-coupling and Crosstalk between waveguides by adding silicon ribbon waveguides between an array and genetic optimization during characterization. A 16-channel OPA with different pitches and built with a silicon ribbon waveguide was successfully fabricated. Measurements show that adding the silicon ribbon will slightly improve the viewable field angle of the OPA, and the side lobe can be reduced by 3~4 dB. By adding the SMSR fitness to the genetic algorithm optimization, the measurement can achieve a stable FoV for OPA with a larger pitch and reduce the side lobe for a smaller pitch. In this study, the horizontal FoV is greater than 60 degrees, the vertical FoV is 0.1025 degrees per nanometer, the horizontal FWHM is 2.16~3.04 degrees, and the SMSR is about 13~18 dB.

摘要 I Abstract IV 誌謝 VI 目錄 VII 圖目錄 1 表目錄 5 第一章 導論 6 1.1前言 6 1.2研究背景 7 1.3研究動機 9 1.4論文架構 9 第二章 環形共振器理論 10 2.1 環型共振器原理 10 2.2 微環形共振器重要參數 13 2.3 RING 頻譜分析 15 2.4 光纖低同調光學干涉 16 第三章 環形共振器模擬 19 3.1 RING DOWN現象之模擬 19 3.2 MMI設計與模擬 25 第四章 LiDAR繞射與波導理論 28 4.1 司乃耳定律( SNELL’S LAW ) 28 4.2 波導結構 29 4.3 波導單、多模之條件 32 4.4 耦合理論(COUPLING MODE THEORY) 34 第五章 光學相位陣列元件及理論介紹 41 5.1多模干涉耦合器 41 5.2熱相位偏移器 43 5.3光柵耦合器操作及理論 45 5.3.1概述 45 5.3.2布拉格條件 (Bragg Condition) 46 5.3.3光柵耦合理論 47 5.4光學相位陣列理論 51 5.4.1相位陣列理論 51 5.4.2自由空間中的成像繞射理論 55 5.4.3天線間距 56 第六章 相位陣列元件設計 58 6.1 多模干涉耦合器模擬 58 6.2一維天線陣列設計與模擬 60 6.3二維天線陣列設計與模擬 62 6.3.1波導光柵:線寬蝕刻 63 6.3.2波導光柵:深淺蝕刻 67 6.3.3光柵天線晶片設計與下線規格 70 第七章 實驗結果與討論 72 7.1波導耦合實驗平台 72 7.1.1光柵耦合 72 7.2 LIDAR量測系統架設 74 7.2.1 LiDAR遠場的量測步驟 74 7.2.2 LiDAR量測平台 74 7.3量測結果與分析 75 7.3.1 MMI量測 75 7.3.2 MZI結構之Vπ量測 76 7.3.3二維OPA水平掃描與相位調控 77 7.3.4二維OPA垂直掃描與波長調控 83 第八章 結論與未來展望 86 8.1結論 87 8.2未來展望 87 參考文獻 89

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