由於半導體製造技術和晶片上元件微小型化的進步，矽光學生物感測器在醫療診斷方面取得了重大進展。使用SOI (Silicon-on-insulator)為基板的微環形諧振腔(Microring Resonator; MRR)，其矽核心層與二氧化矽覆蓋層之間具有高折射率差，元件尺度可以微小化，同時可與CMOS製程相容，被廣泛應用於生物感測方面。
本論文結合Mach-Zehnder干涉儀和微環形諧振腔的特性，提出了增加光學生物感測器的靈敏度。不同於傳統微環形諧振腔以波長感測的方式，此篇論文採用空間相位量測的方式，以光纖通訊波段之寬頻低同調干涉光源，結合Mach-Zehnder干涉儀作為實驗架構主體。並可以高階干涉波包來分析待測物不同濃度的變化，其靈敏度為0.247μm/(μg/mL)

Due to the advance in semiconductor manufacturing technology and micro-miniature components on wafers, silicon based optical biosensors have made significant advances in medical diagnostics. The SOI (Silicon-on-insulator) based as microring resonator (MRR) substrates owns a high refractive index difference between the silicon core layer and silicon dioxide cladding layer, and makes the small foot print possible. Moreover, its fabrication is CMOS compatible and is widely utilized in biosensing.
We propose to combine the characteristics of Mach-Zehnder interferometer and MRR for optical biosensor sensitivity enhancement. Different from the traditional MRR sensing wavelength, the spatial phase measurement is proposed to utilize the higher order interferograms for biosensing from the Mach-Zehnder interferometer through the low-coherence source in the optical fiber communication wavelength range. The glucose sensitivity at various analytes concentrations demonstrates 0.247 μm/(μg / mL).

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