近年來分光功率器廣泛被應用在光電積體電路上，像是光訊號的傳輸、放大、接收、和保護…等，還可以應用在差動相位偏移調變(Differential Phase Shift Keying，DPSK)的光解調變器(Dmodulator)及三工器(Triplexer)等地方。分光功率器最常見的為多模干涉器(Multimode Interference，MMI)和方向耦合器(Directional Coupler，DC)，前者有體積小、製程容忍度高、極化不敏感以及對波長不敏感…等優點，但通常因設計方式，而被限制在只有幾種分光率上；後者在這一方面則有極大的的優勢，它可藉由調整耦合的長度達到任意的功率分配，但是卻有著製程容忍度低及波長敏感的缺點，故在此提出馬克-詹德方向耦合器(Mach–Zehnder Directional Coupler，MZDC)的方法，它是由兩段方向耦合器中間加上一段小的延遲長度所組成的，可改善波長敏感的缺點。
絕緣層上覆矽近年來廣泛應用於高速且低功耗電子元件，因為具有高折射率係數可大幅縮小元件體積，其製程方式與互補式金屬氧化物半導體製程相容，對發展光電積體電路有極大的潛力。本研究利用絕緣層上覆矽模擬設計、製程及量測馬克-詹德方向耦合器的分光元件，並將其應用在差動相位偏移調變的光解調變器上。文中馬克-詹德方向耦合器的設計分成三種不同的分光率，並探討其分光率在C(1530~1565nm)頻帶的輸出比例是否對波長有不敏感的現象。
使用差動相位偏移調變系統是為了改善傳統的開關調變系統，在高速長距離傳輸過程中會引起較嚴重的色散。差動相位偏移調變系統與振幅調變系統不同的是在接收端，為了恢復未編碼前的二進制數據，需加入一個延遲干涉儀做解調的動作。最後使用馬克-詹德方向耦合器組成的延遲干涉儀做高速通訊解調變的應用。

In recent years, the optical power splitter is widely utilized in optoelectronic integrated circuits (OEIC) such as optical signal transmission, amplification, receiving, and protection. It can also be applied to the triplexer and optical demodulator differential phase shift keying (DPSK) modulation format. The most common power splitter is multimode interference (MMI) and directional coupler (DC). MMI owns the advantage on the small size, high process tolerance, and the insensitivity to polarization and wavelength. But the MMI structure is limited to few power splitting ratios because of its mirror image function. In the other hand, DC can achieve any combination of the output optical power distribution by adjusting the coupling length. But it suffers from low process tolerance and strong wavelength dependence. Therefore, the Mach–Zehnder directional coupler (MZDC) was proposed to construct two stages of DC by a small delay length between two DCs for the insensitive wavelength response.
The silicon-on-insulator (SOI) platform has been developed and demonstrated as a highly optoelectronic integrated circuits (OEIC) due to the large refractive index and its compatibility with the complementary metal oxide semiconductor (CMOS) standard process. In this study, we designed, processed, and characterized the SOI based MZDC for optical power splitting, and furthermore apply to the DPSK optical demodulator. Three different kinds of power splitting ratios between 1530 nm to 1565 nm (C band) were demonstrated less than 1-dB fluctuation on MZDC.
The DPSK modulation format is superior to on-off-keying on the significant dispersion from the high-speed long-haul transmission. The main difference between DPSK and amplitude modulation systems s at at the receiving end. In order to restore the uncoded binary data, it needs to add the action of a delay interferometer demodulation. Finally, the MZDC based delayed Mach-Zehnder interferometer was demonstrated and analyzed for demodulation in high speed communicant.

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